{"id":131324,"date":"2024-03-18T13:47:40","date_gmt":"2024-03-18T05:47:40","guid":{"rendered":"https:\/\/www.alpapowder.com\/131324\/"},"modified":"2024-03-18T13:47:40","modified_gmt":"2024-03-18T05:47:40","slug":"%eb%b0%98%eb%8f%84%ec%b2%b4-%ec%9e%a5%eb%b9%84%ec%9d%98-%ed%95%b5%ec%8b%ac-%ea%b0%95%ec%a0%90-%ed%83%84%ed%99%94-%ea%b7%9c%ec%86%8c-%eb%b6%80%ed%92%88","status":"publish","type":"post","link":"https:\/\/www.alpapowder.com\/ko\/131324\/","title":{"rendered":"\ubc18\ub3c4\uccb4 \uc7a5\ube44\uc758 ‘\ud575\uc2ec \uac15\uc810’ – \ud0c4\ud654 \uaddc\uc18c \ubd80\ud488"},"content":{"rendered":"

\"\"<\/p>\n

\ud0c4\ud654\uaddc\uc18c(SiC)\ub294 \uc6b0\uc218\ud55c \ud2b9\uc131\uc744 \uc9c0\ub2cc \uad6c\uc870\uc6a9 \uc138\ub77c\ubbf9 \uc18c\uc7ac\uc785\ub2c8\ub2e4. \ud0c4\ud654 \uaddc\uc18c \ubd80\ud488, \uc989 \ud0c4\ud654 \uaddc\uc18c\uc640 \uadf8 \ubcf5\ud569 \uc7ac\ub8cc\ub97c \uc8fc\uc7ac\ub8cc\ub85c \ud55c \uc7a5\ube44 \ubd80\ud488\uc740 \uace0\ubc00\ub3c4, \ub192\uc740 \uc5f4\uc804\ub3c4\uc728, \ub192\uc740 \uad7d\ud798 \uac15\ub3c4, \ud070 \ud0c4\uc131 \uacc4\uc218 \ub4f1\uc758 \ud2b9\uc131\uc744 \uac00\uc9c0\uba70 \uc6e8\uc774\ud37c\uc5d0 \uc801\uc6a9\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. Epitaxy, Etching \ub4f1 \uc81c\uc870 \uacf5\uc815 \uc911 \ubd80\uc2dd\uc131\uc774 \ub192\uace0 \ucd08\uace0\uc628\uc758 \uac00\ud639\ud55c \ubc18\uc751 \ud658\uacbd\uc73c\ub85c \uc778\ud574 Epitaxis \uc131\uc7a5 \uc7a5\ube44, Etching \uc7a5\ube44, \uc0b0\ud654\/\ud655\uc0b0\/\uc5b4\ub2d0\ub9c1 \uc7a5\ube44 \ub4f1 \uc8fc\uc694 \ubc18\ub3c4\uccb4 \uc7a5\ube44\uc5d0 \ub110\ub9ac \uc0ac\uc6a9\ub429\ub2c8\ub2e4.<\/p>\n

\uacb0\uc815 \uad6c\uc870\uc5d0 \ub530\ub77c \ud0c4\ud654\uaddc\uc18c\uc758 \uacb0\uc815 \ud615\ud0dc\ub294 \ub2e4\uc591\ud569\ub2c8\ub2e4. \ud604\uc7ac \uc77c\ubc18\uc801\uc778 SiC\ub294 \uc8fc\ub85c 3C, 4H \ubc0f 6H \uc720\ud615\uc785\ub2c8\ub2e4. SiC\uc758 \ub2e4\uc591\ud55c \uacb0\uc815 \ud615\ud0dc\ub294 \ub2e4\uc591\ud55c \uc6a9\ub3c4\ub85c \uc0ac\uc6a9\ub429\ub2c8\ub2e4. \uadf8 \uc911 3C-SiC\ub294 \u03b2-SiC\ub77c\uace0\ub3c4 \ubd88\ub9b0\ub2e4. \u03b2-SiC\uc758 \uc911\uc694\ud55c \uc6a9\ub3c4\ub294 \ud544\ub984 \ubc0f \ucf54\ud305 \uc7ac\ub8cc\uc785\ub2c8\ub2e4. \ub530\ub77c\uc11c \u03b2-SiC\ub294 \ud604\uc7ac \ud751\uc5f0 \ubca0\uc774\uc2a4 \ucf54\ud305\uc758 \uc8fc\uc694 \uc18c\uc7ac\uc774\ub2e4.<\/p>\n

\uc81c\uc870 \uacf5\uc815\uc5d0 \ub530\ub77c \ud0c4\ud654 \uaddc\uc18c \ubd80\ud488\uc740 \ud654\ud559 \uae30\uc0c1 \uc99d\ucc29 \ud0c4\ud654 \uaddc\uc18c (CVD SiC), \ubc18\uc751 \uc18c\uacb0 \ud0c4\ud654 \uaddc\uc18c, \uc7ac\uacb0\uc815 \uc18c\uacb0 \ud0c4\ud654 \uaddc\uc18c, \ub300\uae30\uc555 \uc18c\uacb0 \ud0c4\ud654 \uaddc\uc18c, \uc5f4\uac04 \uc555\ucc29 \uc18c\uacb0 \ud0c4\ud654 \uaddc\uc18c, \uc5f4\uac04 \ub4f1\uc555 \uc555\ucc29 \uc18c\uacb0 \ubc0f \ud0c4\ud654 \uc2e4\ub9ac\ucf58 \ub4f1<\/p>\n

\uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc \ubd80\ud488<\/p>\n

1. CVD \uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc \ubd80\ud488<\/p>\n

CVD \ud0c4\ud654\uaddc\uc18c \ubd80\ud488\uc740 \uc5d0\uce6d \uc7a5\ube44, MOCVD \uc7a5\ube44, SiC \uc5d0\ud53c\ud14d\uc15c \uc7a5\ube44, \uae09\uc18d \uc5f4\ucc98\ub9ac \uc7a5\ube44 \ubc0f \uae30\ud0c0 \ubd84\uc57c\uc5d0\uc11c \ub110\ub9ac \uc0ac\uc6a9\ub429\ub2c8\ub2e4.<\/p>\n

\uc5d0\uce6d \uc7a5\ube44: CVD \uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc \ubd80\ud488\uc758 \uac00\uc7a5 \ud070 \uc2dc\uc7a5 \ubd80\ubb38\uc740 \uc5d0\uce6d \uc7a5\ube44\uc785\ub2c8\ub2e4. \uc5d0\uce6d \uc7a5\ube44\uc758 CVD \ud0c4\ud654\uaddc\uc18c \ubd80\ud488\uc5d0\ub294 \ud3ec\ucee4\uc2f1 \ub9c1, \uac00\uc2a4 \uc0e4\uc6cc \ud5e4\ub4dc, \ud2b8\ub808\uc774, \uc5e3\uc9c0 \ub9c1 \ub4f1\uc774 \ud3ec\ud568\ub429\ub2c8\ub2e4. CVD \ud0c4\ud654\uaddc\uc18c\ub294 \uc5fc\uc18c \ubc0f \ubd88\uc18c \ud568\uc720 \uc5d0\uce6d \uac00\uc2a4\uc5d0 \ub300\ud55c \ubc18\uc751\uc131\uacfc \uc804\ub3c4\uc131\uc774 \ub0ae\uae30 \ub54c\ubb38\uc5d0 \ud50c\ub77c\uc988\ub9c8\uc5d0 \uc774\uc0c1\uc801\uc778 \uc7ac\ub8cc\uac00 \ub429\ub2c8\ub2e4. \uc5d0\uce6d \uc7a5\ube44\uc758 \ud3ec\ucee4\uc2a4 \ub9c1\uacfc \uac19\uc740 \ubd80\ud488.<\/p>\n

\ud751\uc5f0 \ubca0\uc774\uc2a4 \ucf54\ud305: \uc800\uc555 \ud654\ud559 \uae30\uc0c1 \uc99d\ucc29(CVD)\uc740 \ud604\uc7ac \uc870\ubc00\ud55c SiC \ucf54\ud305\uc744 \uc900\ube44\ud558\ub294 \ub370 \uac00\uc7a5 \ud6a8\uacfc\uc801\uc778 \uacf5\uc815\uc785\ub2c8\ub2e4. CVD-SiC \ucf54\ud305\uc758 \ub450\uaed8\ub294 \uc81c\uc5b4\uac00 \uac00\ub2a5\ud558\uace0 \uade0\uc77c\ud558\ub2e4\ub294 \uc7a5\uc810\uc774 \uc788\uc2b5\ub2c8\ub2e4. SiC \ucf54\ud305 \ud751\uc5f0 \ubca0\uc774\uc2a4\ub294 \ub2e8\uacb0\uc815 \uae30\ud310\uc744 \uc9c0\uc9c0\ud558\uace0 \uac00\uc5f4\ud558\uae30 \uc704\ud574 MOCVD(\uae08\uc18d-\uc720\uae30 \ud654\ud559 \uae30\uc0c1 \uc99d\ucc29) \uc7a5\ube44\uc5d0 \uc77c\ubc18\uc801\uc73c\ub85c \uc0ac\uc6a9\ub429\ub2c8\ub2e4. MOCVD \uc7a5\ube44\uc758 \ud575\uc2ec\uc774\uc790 \ud575\uc2ec \ubd80\ud488\uc785\ub2c8\ub2e4.<\/p>\n

2. \ubc18\uc751 \uc18c\uacb0 \ud0c4\ud654 \uaddc\uc18c \ubd80\ud488<\/p>\n

\ubc18\uc751 \uc18c\uacb0(\ubc18\uc751\uc131 \uce68\ud22c \ub610\ub294 \ubc18\uc751 \uacb0\ud569) SiC \uc7ac\ub8cc\uc758 \uacbd\uc6b0 \uc18c\uacb0 \ub77c\uc778 \uc218\ucd95\ub960\uc744 1% \ubbf8\ub9cc\uc73c\ub85c \uc81c\uc5b4\ud560 \uc218 \uc788\uc73c\uba70 \uc18c\uacb0 \uc628\ub3c4\uac00 \uc0c1\ub300\uc801\uc73c\ub85c \ub0ae\uc544 \ubcc0\ud615 \uc81c\uc5b4 \ubc0f \uc18c\uacb0 \uc7a5\ube44\uc5d0 \ub300\ud55c \uc694\uad6c \uc0ac\ud56d\uc774 \ud06c\uac8c \uc904\uc5b4\ub4ed\ub2c8\ub2e4. \ub530\ub77c\uc11c \uc774 \uae30\uc220\uc740 \ub300\uaddc\ubaa8 \ubd80\ud488 \uc81c\uc791\uc774 \uc6a9\uc774\ud558\ub2e4\ub294 \uc7a5\uc810\uc774 \uc788\uc5b4 \uad11\ud559 \ubc0f \uc815\ubc00\uad6c\uc870\ubb3c \uc81c\uc870 \ubd84\uc57c\uc5d0\uc11c \ub110\ub9ac \ud65c\uc6a9\ub418\uace0 \uc788\ub2e4.<\/p>\n","protected":false},"excerpt":{"rendered":"

\uacb0\uc815 \uad6c\uc870\uc5d0 \ub530\ub77c \ud0c4\ud654\uaddc\uc18c\uc758 \uacb0\uc815 \ud615\ud0dc\ub294 \ub2e4\uc591\ud569\ub2c8\ub2e4.<\/p>\n","protected":false},"author":7,"featured_media":131301,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"footnotes":""},"categories":[845],"tags":[],"class_list":["post-131324","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category---ko"],"acf":[],"_links":{"self":[{"href":"https:\/\/www.alpapowder.com\/ko\/wp-json\/wp\/v2\/posts\/131324","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.alpapowder.com\/ko\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.alpapowder.com\/ko\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.alpapowder.com\/ko\/wp-json\/wp\/v2\/users\/7"}],"replies":[{"embeddable":true,"href":"https:\/\/www.alpapowder.com\/ko\/wp-json\/wp\/v2\/comments?post=131324"}],"version-history":[{"count":0,"href":"https:\/\/www.alpapowder.com\/ko\/wp-json\/wp\/v2\/posts\/131324\/revisions"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.alpapowder.com\/ko\/wp-json\/wp\/v2\/media\/131301"}],"wp:attachment":[{"href":"https:\/\/www.alpapowder.com\/ko\/wp-json\/wp\/v2\/media?parent=131324"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.alpapowder.com\/ko\/wp-json\/wp\/v2\/categories?post=131324"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.alpapowder.com\/ko\/wp-json\/wp\/v2\/tags?post=131324"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}