{"id":134218,"date":"2024-09-09T15:58:51","date_gmt":"2024-09-09T07:58:51","guid":{"rendered":"https:\/\/www.alpapowder.com\/134218\/"},"modified":"2024-09-09T15:58:52","modified_gmt":"2024-09-09T07:58:52","slug":"%ec%b9%a9%ec%97%90%ec%84%9c-%ec%8b%a4%eb%a6%ac%ec%bd%98-%ec%a7%88%ed%99%94%eb%ac%bcsinx%ec%9d%98-%ec%a4%91%ec%9a%94%ec%84%b1","status":"publish","type":"post","link":"https:\/\/www.alpapowder.com\/ko\/134218\/","title":{"rendered":"\uce69\uc5d0\uc11c \uc2e4\ub9ac\ucf58 \uc9c8\ud654\ubb3c(SiNx)\uc758 \uc911\uc694\uc131"},"content":{"rendered":"

\"\"<\/p>\n

\uce69 \uc81c\uc870\uc5d0\uc11c \uc911\uc694\ud55c \uc5ed\ud560\uc744 \ud558\ub294 \uc7ac\ub8cc\uac00 \uc788\ub294\ub370, \ubc14\ub85c \uc9c8\ud654\uaddc\uc18c(SiNx)\uc785\ub2c8\ub2e4. \uc2e4\ub9ac\ucf58(Si), \ube44\uc18c\ud654\uac08\ub968(GaAs) \ub610\ub294 \uc9c8\ud654\uac08\ub968(GaN)\uacfc \uac19\uc740 \ub2e4\ub978 \uc798 \uc54c\ub824\uc9c4 \ubc18\ub3c4\uccb4 \uc7ac\ub8cc\ub9cc\ud07c \uc8fc\ubaa9\ubc1b\uc9c0\ub294 \ubabb\ud558\uc9c0\ub9cc, \uadf8 \uc911\uc694\uc131\uc740 \uc758\uc2ec\ud560 \uc5ec\uc9c0\uac00 \uc5c6\uc2b5\ub2c8\ub2e4. \ub300\ubd80\ubd84\uc758 \uce69\uc774 \uc774 \uc7ac\ub8cc\ub97c \uc0ac\uc6a9\ud55c\ub2e4\uace0 \ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n

\ubc18\ub3c4\uccb4 \uc0b0\uc5c5\uc5d0\uc11c \ub2e4\uc591\ud55c \uc751\uc6a9 \ubd84\uc57c\uc5d0 \uc0ac\uc6a9\ub418\ub294 \uc9c8\ud654\uaddc\uc18c\ub294 \uc885\uc885 \ubd88\uade0\uc77c\ud558\uba70, \uc77c\ubc18\uc801\uc73c\ub85c SiNx\ub85c \ud45c\ud604\ub429\ub2c8\ub2e4. SiNx\ub294 \uc9c8\uc18c\uc640 \uc2e4\ub9ac\ucf58\uc758 \ube44\uc728, \uc989 x \uac12\uc5d0 \ub530\ub77c \ud2b9\uc131\uc774 \ub2ec\ub77c\uc9c0\ub294 \ube44\uc815\uc9c8 \uc7ac\ub8cc\uc785\ub2c8\ub2e4. x \uac12\uc774 \ubcc0\uacbd\ub418\uba74 \uc9c8\ud654\uaddc\uc18c\uc758 \ubb3c\ub9ac\uc801 \ubc0f \ud654\ud559\uc801 \ud2b9\uc131\ub3c4 \ubcc0\uacbd\ub429\ub2c8\ub2e4. \uc9c8\ud654\uaddc\uc18c\ub294 Si3N4, Si2N2, SiN \ub4f1 \uc5ec\ub7ec \ud615\ud0dc\ub85c \uc81c\uacf5\ub429\ub2c8\ub2e4.<\/p>\n

Si3N4\ub294 \uacb0\uc815\uc9c8 \uc7ac\ub8cc\uc774\ubbc0\ub85c \uc2e4\ub9ac\ucf58\uacfc \uc9c8\uc18c\uc758 \ube44\uc728\uc774 \uace0\uc815\ub418\uc5b4 \uc788\uc2b5\ub2c8\ub2e4. x \uac12\uc774 4\/3\uc774\uba74 SiNx\ub294 Si3N4\uc640 \uac19\uc2b5\ub2c8\ub2e4. \uadf8\ub7ec\ub098 \uc2e4\uc81c \uc751\uc6a9 \ubd84\uc57c\uc5d0\uc11c SiNx\ub294 \uc885\uc885 \uace0\uc815\ub418\uc9c0 \uc54a\uc73c\uba70, \uc2e4\ub9ac\ucf58 \ub300 \uc9c8\uc18c\uc758 \ube44\uc728\uc740 PVD \ub610\ub294 CVD \uacf5\uc815\uc758 \ub9e4\uac1c\ubcc0\uc218\ub97c \ubcc0\uacbd\ud558\uc5ec \uc870\uc815\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n

\uc9c8\ud654\uaddc\uc18c\ub294 \ucd5c\ub300 10^14 \u03a9\u00b7cm\uc758 \uc800\ud56d\ub960\uc744 \uac00\uc9c4 \uc6b0\uc218\ud55c \uc808\uc5f0 \ud2b9\uc131\uc744 \uac00\uc9c0\uace0 \uc788\uc5b4 \uc2e4\ub9ac\ucf58 \uc0b0\ud654\ubb3c(SiO2<\/a>)\uacfc \uac19\uc740 \uc77c\ubd80 \uc77c\ubc18\uc801\uc778 \uc808\uc5f0 \uc7ac\ub8cc\ub97c \ud6e8\uc52c \ub2a5\uac00\ud569\ub2c8\ub2e4. \uc720\uc804\uc728\uc774 \ub0ae\uc544 \ub9c8\uc774\ud06c\ub85c\ud30c \ubc0f \ubb34\uc120 \uc8fc\ud30c\uc218 \uc751\uc6a9 \ubd84\uc57c\uc5d0\uc11c \uc774\uc0c1\uc801\uc778 \uc808\uc5f0 \uce35\uc774 \ub429\ub2c8\ub2e4. \uc9c8\ud654\uaddc\uc18c \uce35\uc740 \ub610\ud55c \uce69\uc5d0\uc11c \ubd88\uc21c\ubb3c \ud655\uc0b0\uc5d0 \ub300\ud55c \uc7a5\ubcbd \uc5ed\ud560\uc744 \ud569\ub2c8\ub2e4. \ubd95\uc18c \ubc0f \uc778\uacfc \uac19\uc740 \ub3c4\ud380\ud2b8\uac00 \ud655\uc0b0\uc744 \ud1b5\ud574 \uc7a5\uce58 \ud2b9\uc131\uc744 \ubcc0\uacbd\ud558\ub294 \uac83\uc744 \ubc29\uc9c0\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \ub610\ud55c \ub2e8\ub77d\uacfc \uac19\uc740 \uc624\ub958\ub97c \ubc29\uc9c0\ud558\uae30 \uc704\ud574 \uae08\uc18d \uc774\uc628\uc758 \ud655\uc0b0\uc744 \ubc29\uc9c0\ud560 \uc218\ub3c4 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n

\uc9c8\ud654\uaddc\uc18c\ub294 \ud2b9\uc218\ud55c \ud654\ud559\uc801 \ud2b9\uc131\uacfc \uacb0\uc815 \uad6c\uc870\uc5d0 \uc758\ud574 \uacb0\uc815\ub418\ub294 \uc6b0\uc218\ud55c \uc5f4 \uc548\uc815\uc131\uc744 \uac00\uc9c0\uace0 \uc788\uc2b5\ub2c8\ub2e4. \ub2e4\ub978 \uc7ac\ub8cc\uc640 \uac19\uc774 \ud654\ud559\uc801 \ubd84\ud574\ub098 \ubb3c\ub9ac\uc801 \ubcc0\ud654 \uc5c6\uc774 \uace0\uc628 \ud658\uacbd\uc5d0\uc11c \uc548\uc815\uc744 \uc720\uc9c0\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uadf8 \uc774\uc720\ub294 \uc9c8\ud654\uaddc\uc18c\uc758 \uacb0\uc815 \uad6c\uc870\uc5d0\uc11c \uac01 \uc2e4\ub9ac\ucf58 \uc6d0\uc790\ub294 \uc0ac\uba74\uccb4 \ud615\ud0dc\ub85c 4\uac1c\uc758 \uc9c8\uc18c \uc6d0\uc790\uc640 \uacb0\ud569\ud558\uace0, \uac01 \uc9c8\uc18c \uc6d0\uc790\ub294 \ub610\ud55c \uc0ac\uba74\uccb4 \ud615\ud0dc\ub85c 4\uac1c\uc758 \uc2e4\ub9ac\ucf58 \uc6d0\uc790\uc640 \uacb0\ud569\ud558\uae30 \ub54c\ubb38\uc785\ub2c8\ub2e4. \uc774 \uad6c\uc870\ub294 \uc9c8\ud654\uaddc\uc18c\uc758 \uacb0\uc815 \uaca9\uc790\ub97c \ub9e4\uc6b0 \uc548\uc815\uc801\uc774\uace0 \ubcc0\ud615\ud558\uae30 \uc5b4\ub835\uac8c \ub9cc\ub4ed\ub2c8\ub2e4. \ub530\ub77c\uc11c \uace0\uc804\uc790 \uc774\ub3d9\ub3c4 \ud2b8\ub79c\uc9c0\uc2a4\ud130(HEMT)\ub97c \uc81c\uc870\ud560 \ub54c \uac8c\uc774\ud2b8 \uc808\uc5f0\uce35\uc73c\ub85c \uc0ac\uc6a9\ub429\ub2c8\ub2e4.<\/p>\n

SiO2\uc5d0 \ube44\ud574 SiNx\uc758 \uc7a5\uc810\uc740 \ubb34\uc5c7\uc785\ub2c8\uae4c?<\/p>\n

\ub354 \ub098\uc740 \uc5f4 \uc548\uc815\uc131, \ub354 \ub2e8\ub2e8\ud55c \uacbd\ub3c4, \ub354 \uc5b4\ub824\uc6b4 \uc5d0\uce6d.<\/p>\n","protected":false},"excerpt":{"rendered":"

\ubc18\ub3c4\uccb4 \uc0b0\uc5c5\uc5d0\uc11c \ub2e4\uc591\ud55c \uc751\uc6a9 \ubd84\uc57c\uc5d0 \uc0ac\uc6a9\ub418\ub294 \uc9c8\ud654\uaddc\uc18c\ub294 \uc885\uc885 \ubd88\uade0\uc77c\ud558\uba70 \uc77c\ubc18\uc801\uc73c\ub85c SiNx\ub85c \ud45c\ud604\ub429\ub2c8\ub2e4.<\/p>\n","protected":false},"author":7,"featured_media":134195,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"footnotes":""},"categories":[845],"tags":[],"class_list":["post-134218","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category---ko"],"acf":[],"_links":{"self":[{"href":"https:\/\/www.alpapowder.com\/ko\/wp-json\/wp\/v2\/posts\/134218"}],"collection":[{"href":"https:\/\/www.alpapowder.com\/ko\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.alpapowder.com\/ko\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.alpapowder.com\/ko\/wp-json\/wp\/v2\/users\/7"}],"replies":[{"embeddable":true,"href":"https:\/\/www.alpapowder.com\/ko\/wp-json\/wp\/v2\/comments?post=134218"}],"version-history":[{"count":1,"href":"https:\/\/www.alpapowder.com\/ko\/wp-json\/wp\/v2\/posts\/134218\/revisions"}],"predecessor-version":[{"id":134219,"href":"https:\/\/www.alpapowder.com\/ko\/wp-json\/wp\/v2\/posts\/134218\/revisions\/134219"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.alpapowder.com\/ko\/wp-json\/wp\/v2\/media\/134195"}],"wp:attachment":[{"href":"https:\/\/www.alpapowder.com\/ko\/wp-json\/wp\/v2\/media?parent=134218"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.alpapowder.com\/ko\/wp-json\/wp\/v2\/categories?post=134218"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.alpapowder.com\/ko\/wp-json\/wp\/v2\/tags?post=134218"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}