{"id":131336,"date":"2024-03-18T13:57:42","date_gmt":"2024-03-18T05:57:42","guid":{"rendered":"https:\/\/www.alpapowder.com\/131336\/"},"modified":"2024-03-18T13:57:42","modified_gmt":"2024-03-18T05:57:42","slug":"yari-iletken-ekipmanin-temel-gucu-silisyum-karbur-bilesenler","status":"publish","type":"post","link":"https:\/\/www.alpapowder.com\/tr\/131336\/","title":{"rendered":"Yar\u0131 iletken ekipman\u0131n “temel g\u00fcc\u00fc” – silisyum karb\u00fcr bile\u015fenler"},"content":{"rendered":"

\"\"<\/p>\n

Silisyum karb\u00fcr (SiC), m\u00fckemmel \u00f6zelliklere sahip yap\u0131sal bir seramik malzemedir. Silisyum karb\u00fcr par\u00e7alar, yani ana malzemeler olarak silisyum karb\u00fcr ve onun kompozit malzemelerinden yap\u0131lan ekipman par\u00e7alar\u0131, y\u00fcksek yo\u011funluk, y\u00fcksek \u0131s\u0131 iletkenli\u011fi, y\u00fcksek b\u00fck\u00fclme mukavemeti, b\u00fcy\u00fck elastik mod\u00fcl vb. \u00f6zelliklere sahiptir ve levhaya uyarlanabilir. epitaksi, a\u015f\u0131nd\u0131rma vb. \u00dcretim s\u00fcrecindeki son derece a\u015f\u0131nd\u0131r\u0131c\u0131 ve ultra y\u00fcksek s\u0131cakl\u0131ktaki sert reaksiyon ortam\u0131 nedeniyle, epitaksiyel b\u00fcy\u00fctme ekipman\u0131, a\u015f\u0131nd\u0131rma ekipman\u0131 ve oksidasyon\/dif\u00fczyon\/tavlama ekipman\u0131 gibi b\u00fcy\u00fck yar\u0131 iletken ekipmanlarda yayg\u0131n olarak kullan\u0131l\u0131r.<\/p>\n

Kristal yap\u0131s\u0131na g\u00f6re silisyum karb\u00fcr\u00fcn bir\u00e7ok kristal formu vard\u0131r. \u015eu anda yayg\u0131n olarak kullan\u0131lan SiC esas olarak 3C, 4H ve 6H tipleridir. SiC’nin farkl\u0131 kristal formlar\u0131n\u0131n farkl\u0131 kullan\u0131mlar\u0131 vard\u0131r. Bunlar aras\u0131nda 3C-SiC’ye s\u0131kl\u0131kla \u03b2-SiC de denir. \u03b2-SiC’nin \u00f6nemli bir kullan\u0131m\u0131 film ve kaplama malzemesidir. Bu nedenle \u03b2-SiC \u015fu anda grafit bazl\u0131 kaplaman\u0131n ana malzemesidir.<\/p>\n

Haz\u0131rlama i\u015flemine g\u00f6re silisyum karb\u00fcr par\u00e7alar\u0131 kimyasal buhar biriktirmeli silisyum karb\u00fcr (CVD SiC), reaksiyon sinterlenmi\u015f silisyum karb\u00fcr, yeniden kristalle\u015ftirme sinterlenmi\u015f silisyum karb\u00fcr, atmosferik bas\u0131n\u00e7ta sinterlenmi\u015f silisyum karb\u00fcr, s\u0131cak presleme sinterlenmi\u015f silisyum karb\u00fcr, s\u0131cak izostatik presleme sinterleme ve karbonizasyon Silikon vb.<\/p>\n

Silisyum karb\u00fcr par\u00e7alar<\/p>\n

1. CVD silisyum karb\u00fcr par\u00e7alar<\/p>\n

CVD silisyum karb\u00fcr bile\u015fenleri a\u015f\u0131nd\u0131rma ekipmanlar\u0131nda, MOCVD ekipmanlar\u0131nda, SiC epitaksiyel ekipmanlar\u0131nda, h\u0131zl\u0131 \u0131s\u0131l i\u015flem ekipmanlar\u0131nda ve di\u011fer alanlarda yayg\u0131n olarak kullan\u0131lmaktad\u0131r.<\/p>\n

Da\u011flama ekipman\u0131: CVD silisyum karb\u00fcr bile\u015fenleri i\u00e7in en b\u00fcy\u00fck pazar segmenti da\u011flama ekipman\u0131d\u0131r. A\u015f\u0131nd\u0131rma ekipman\u0131ndaki CVD silisyum karb\u00fcr bile\u015fenleri aras\u0131nda odaklama halkalar\u0131, gaz du\u015f ba\u015fl\u0131klar\u0131, tepsiler, kenar halkalar\u0131 vb. yer al\u0131r. CVD silisyum karb\u00fcr\u00fcn klor ve flor i\u00e7eren a\u015f\u0131nd\u0131rma gazlar\u0131na kar\u015f\u0131 d\u00fc\u015f\u00fck reaktivitesi ve iletkenli\u011fi nedeniyle plazma i\u00e7in ideal bir malzeme haline gelir. grav\u00fcr ekipman\u0131ndaki odak halkalar\u0131 gibi bile\u015fenler.<\/p>\n

Grafit bazl\u0131 kaplama: D\u00fc\u015f\u00fck bas\u0131n\u00e7l\u0131 kimyasal buhar biriktirme (CVD), \u015fu anda yo\u011fun SiC kaplamalar\u0131n haz\u0131rlanmas\u0131nda en etkili i\u015flemdir. CVD-SiC kaplamalar\u0131n kal\u0131nl\u0131\u011f\u0131 kontrol edilebilir ve tekd\u00fczelik avantajlar\u0131na sahiptir. SiC kapl\u0131 grafit bazlar, tek kristal substratlar\u0131 desteklemek ve \u0131s\u0131tmak i\u00e7in metal-organik kimyasal buhar biriktirme (MOCVD) ekipmanlar\u0131nda yayg\u0131n olarak kullan\u0131l\u0131r. Bunlar MOCVD ekipman\u0131n\u0131n temel ve temel bile\u015fenleridir.<\/p>\n

2. Reaksiyon sinterlenmi\u015f silisyum karb\u00fcr par\u00e7alar<\/p>\n

Reaksiyonla sinterlenmi\u015f (reaktif infiltrasyon veya reaksiyon ba\u011flama) SiC malzemeleri i\u00e7in, sinterleme hatt\u0131ndaki b\u00fcz\u00fclme %1’in alt\u0131nda kontrol edilebilir ve sinterleme s\u0131cakl\u0131\u011f\u0131 nispeten d\u00fc\u015f\u00fckt\u00fcr, bu da deformasyon kontrol\u00fc ve sinterleme ekipman\u0131 gereksinimlerini b\u00fcy\u00fck \u00f6l\u00e7\u00fcde azalt\u0131r. Bu nedenle bu teknoloji, b\u00fcy\u00fck \u00f6l\u00e7ekli bile\u015fenlerin kolayca elde edilmesi avantaj\u0131na sahiptir ve optik ve hassas yap\u0131 imalat\u0131 alanlar\u0131nda yayg\u0131n olarak kullan\u0131lmaktad\u0131r.<\/p>\n","protected":false},"excerpt":{"rendered":"

Kristal yap\u0131s\u0131na g\u00f6re silisyum karb\u00fcr\u00fcn bir\u00e7ok kristal formu vard\u0131r.<\/p>\n","protected":false},"author":7,"featured_media":131301,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"footnotes":""},"categories":[851],"tags":[],"class_list":["post-131336","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-endustri-haberleri-tr"],"acf":[],"_links":{"self":[{"href":"https:\/\/www.alpapowder.com\/tr\/wp-json\/wp\/v2\/posts\/131336","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.alpapowder.com\/tr\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.alpapowder.com\/tr\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.alpapowder.com\/tr\/wp-json\/wp\/v2\/users\/7"}],"replies":[{"embeddable":true,"href":"https:\/\/www.alpapowder.com\/tr\/wp-json\/wp\/v2\/comments?post=131336"}],"version-history":[{"count":0,"href":"https:\/\/www.alpapowder.com\/tr\/wp-json\/wp\/v2\/posts\/131336\/revisions"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.alpapowder.com\/tr\/wp-json\/wp\/v2\/media\/131301"}],"wp:attachment":[{"href":"https:\/\/www.alpapowder.com\/tr\/wp-json\/wp\/v2\/media?parent=131336"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.alpapowder.com\/tr\/wp-json\/wp\/v2\/categories?post=131336"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.alpapowder.com\/tr\/wp-json\/wp\/v2\/tags?post=131336"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}