{"id":130344,"date":"2023-12-14T14:07:26","date_gmt":"2023-12-14T06:07:26","guid":{"rendered":"https:\/\/www.alpapowder.com\/130344\/"},"modified":"2023-12-14T14:07:27","modified_gmt":"2023-12-14T06:07:27","slug":"linh-vuc-ung-dung-cua-bot-alumina-hinh-cau","status":"publish","type":"post","link":"https:\/\/www.alpapowder.com\/vi\/130344\/","title":{"rendered":"L\u0129nh v\u1ef1c \u1ee9ng d\u1ee5ng c\u1ee7a b\u1ed9t Alumina h\u00ecnh c\u1ea7u"},"content":{"rendered":"

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C\u00e1c \u0111\u1eb7c t\u00ednh v\u1eadt l\u00fd v\u00e0 h\u00f3a h\u1ecdc \u0111\u1ed9c \u0111\u00e1o c\u1ee7a alumina h\u00ecnh c\u1ea7u si\u00eau m\u1ecbn l\u00e0m cho n\u00f3 \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng r\u1ed9ng r\u00e3i trong g\u1ed1m sinh h\u1ecdc, v\u1eadt li\u1ec7u l\u1edbp b\u1ea3o v\u1ec7 b\u1ec1 m\u1eb7t, ch\u1ea5t x\u00fac t\u00e1c h\u00f3a h\u1ecdc v\u00e0 ch\u1ea5t mang x\u00fac t\u00e1c, chip m\u1ea1ch t\u00edch h\u1ee3p, h\u00e0ng kh\u00f4ng v\u0169 tr\u1ee5, v\u1eadt li\u1ec7u h\u1ea5p th\u1ee5 h\u1ed3ng ngo\u1ea1i v\u00e0 c\u1ea3m bi\u1ebfn nh\u1ea1y c\u1ea3m v\u1edbi \u0111\u1ed9 \u1ea9m.<\/p>\n

Hi\u1ec7u su\u1ea5t tuy\u1ec7t v\u1eddi c\u1ee7a c\u00e1c s\u1ea3n ph\u1ea9m alumina h\u00ecnh c\u1ea7u si\u00eau m\u1ecbn trong nhi\u1ec1u l\u0129nh v\u1ef1c c\u00f3 li\u00ean quan ch\u1eb7t ch\u1ebd \u0111\u1ebfn h\u00ecnh th\u00e1i v\u00e0 k\u00edch th\u01b0\u1edbc c\u1ee7a c\u00e1c h\u1ea1t b\u1ed9t th\u00f4. H\u00ecnh th\u00e1i \u0111\u1ec1u \u0111\u1eb7n, di\u1ec7n t\u00edch b\u1ec1 m\u1eb7t ri\u00eang nh\u1ecf, m\u1eadt \u0111\u1ed9 \u0111\u00f3ng g\u00f3i l\u1edbn, hi\u1ec7u su\u1ea5t d\u00f2ng ch\u1ea3y t\u1ed1t, \u0111\u1ed9 c\u1ee9ng v\u00e0 \u0111\u1ed9 b\u1ec1n cao c\u00f3 th\u1ec3 c\u1ea3i thi\u1ec7n \u0111\u00e1ng k\u1ec3 hi\u1ec7u su\u1ea5t \u1ee9ng d\u1ee5ng c\u1ee7a s\u1ea3n ph\u1ea9m.<\/p>\n

L\u0129nh v\u1ef1c \u1ee9ng d\u1ee5ng c\u1ee7a b\u1ed9t alumina h\u00ecnh c\u1ea7u<\/p>\n

1. Ch\u1ea5t m\u00e0i m\u00f2n \u0111\u00e1nh b\u00f3ng ch\u00ednh x\u00e1c<\/p>\n

Alumina d\u1ea7n d\u1ea7n \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng r\u1ed9ng r\u00e3i trong c\u00e1c ng\u00e0nh c\u00f4ng nghi\u1ec7p nh\u01b0 gia c\u00f4ng v\u00e0 s\u1ea3n xu\u1ea5t ch\u00ednh x\u00e1c do c\u00f3 \u0111\u1ed9 c\u1ee9ng cao v\u00e0 \u0111\u1ed9 \u1ed5n \u0111\u1ecbnh t\u1ed1t, \u0111\u1eb7c bi\u1ec7t l\u00e0 trong \u0111\u00e1nh b\u00f3ng c\u01a1 h\u1ecdc h\u00f3a h\u1ecdc (CMP).<\/p>\n

2. Nguy\u00ean li\u1ec7u g\u1ed1m \u0111\u1eb7c bi\u1ec7t<\/p>\n

Y\u00eau c\u1ea7u \u0111\u1ed1i v\u1edbi th\u00e2n g\u1ed1m l\u00e0 m\u1eadt \u0111\u1ed9 cao, \u0111\u1ed9 bi\u1ebfn d\u1ea1ng co r\u00fat nh\u1ecf v\u00e0 qu\u00e1 tr\u00ecnh thi\u00eau k\u1ebft d\u1ec5 d\u00e0ng. K\u00edch th\u01b0\u1edbc, h\u00ecnh th\u00e1i v\u00e0 \u0111\u1ed9 ph\u00e2n t\u00e1n c\u1ee7a b\u1ed9t g\u1ed1m l\u00e0 nh\u1eefng ch\u1ec9 s\u1ed1 quan tr\u1ecdng \u0111\u1ec3 \u0111o l\u01b0\u1eddng hi\u1ec7u su\u1ea5t c\u1ee7a b\u1ed9t. Trong s\u1ed1 nhi\u1ec1u h\u00ecnh th\u00e1i c\u1ee7a b\u1ed9t, b\u1ed9t vi m\u00f4 h\u00ecnh c\u1ea7u ph\u00e2n t\u00e1n l\u00e0 t\u1ed1t h\u01a1n.<\/p>\n

3. C\u00e1c \u1ee9ng d\u1ee5ng kh\u00e1c<\/p>\n

B\u1ed9t alumina h\u00ecnh c\u1ea7u c\u00f3 th\u1ec3 \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng l\u00e0m ch\u1ea5t h\u1ed7 tr\u1ee3 cho alumina x\u1ed1p. V\u00ec c\u00e1c l\u1ed7 ch\u00e2n l\u00f4ng \u0111\u01b0\u1ee3c h\u00ecnh th\u00e0nh t\u01b0\u01a1ng \u0111\u1ed1i \u0111\u1ec1u n\u00ean d\u1ec5 d\u00e0ng \u0111\u1ed3ng nh\u1ea5t h\u00f3a to\u00e0n b\u1ed9 v\u1eadt \u0111\u1ee1. B\u1ed9t alumina \u0111\u1ec3 l\u00e0m \u0111\u1ea7y \u0111\u00f2i h\u1ecfi t\u00ednh l\u01b0u \u0111\u1ed9ng t\u1ed1t, kh\u1ea3 n\u0103ng k\u1ebft h\u1ee3p m\u1ea1nh v\u1edbi ch\u1ea5t h\u1eefu c\u01a1 v\u00e0 d\u1ea1ng h\u00ecnh c\u1ea7u \u0111\u01b0\u1ee3c \u01b0a chu\u1ed9ng. Alumina c\u0169ng l\u00e0 nguy\u00ean li\u1ec7u th\u00f4 ch\u00ednh cho ba m\u00e0u c\u01a1 b\u1ea3n v\u00e0 photpho ph\u00e1t quang d\u00e0i. Ngo\u00e0i ra, n\u00f3 c\u00f2n c\u00f3 nhi\u1ec1u \u1ee9ng d\u1ee5ng trong l\u0129nh v\u1ef1c ch\u1ea5t x\u00fac t\u00e1c v\u00e0 ch\u1ea5t mang x\u00fac t\u00e1c.<\/p>\n

 <\/p>\n

Ch\u1ebf t\u1ea1o alumina h\u00ecnh c\u1ea7u si\u00eau m\u1ecbn<\/p>\n

V\u1edbi s\u1ef1 ph\u00e1t tri\u1ec3n nhanh ch\u00f3ng c\u1ee7a ng\u00e0nh c\u00f4ng nghi\u1ec7p to\u00e0n c\u1ea7u, b\u1ed9t alumina h\u00ecnh c\u1ea7u \u0111\u00e3 \u0111\u01b0\u1ee3c nghi\u00ean c\u1ee9u r\u1ed9ng r\u00e3i trong 10 n\u0103m qua. Vi\u1ec7c \u0111i\u1ec1u ch\u1ebf alumina h\u00ecnh c\u1ea7u \u0111\u00e3 tr\u1edf th\u00e0nh m\u1ed9t ch\u1ee7 \u0111\u1ec1 n\u00f3ng trong nghi\u00ean c\u1ee9u v\u1eadt li\u1ec7u.<\/p>\n

Ph\u01b0\u01a1ng ph\u00e1p nghi\u1ec1n bi<\/p>\n

Ph\u01b0\u01a1ng ph\u00e1p nghi\u1ec1n bi l\u00e0 ph\u01b0\u01a1ng ph\u00e1p ph\u1ed5 bi\u1ebfn nh\u1ea5t \u0111\u1ec3 \u0111i\u1ec1u ch\u1ebf b\u1ed9t alumina si\u00eau m\u1ecbn. Vi\u1ec7c quay ho\u1eb7c rung c\u1ee7a m\u00e1y nghi\u1ec1n bi th\u01b0\u1eddng \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng. C\u00e1c nguy\u00ean li\u1ec7u th\u00f4 \u0111\u01b0\u1ee3c t\u00e1c \u0111\u1ed9ng, nghi\u1ec1n v\u00e0 khu\u1ea5y b\u1eb1ng ch\u1ea5t m\u00e0i m\u00f2n, v\u00e0 b\u1ed9t c\u00f3 k\u00edch th\u01b0\u1edbc h\u1ea1t l\u1edbn \u0111\u01b0\u1ee3c tinh ch\u1ebf th\u00e0nh b\u1ed9t si\u00eau m\u1ecbn.<\/p>\n

Ph\u01b0\u01a1ng ph\u00e1p k\u1ebft t\u1ee7a \u0111\u1ed3ng nh\u1ea5t<\/p>\n

Qu\u00e1 tr\u00ecnh k\u1ebft t\u1ee7a trong dung d\u1ecbch \u0111\u1ed3ng nh\u1ea5t l\u00e0 qu\u00e1 tr\u00ecnh trong \u0111\u00f3 h\u1ea1t nh\u00e2n tinh th\u1ec3 h\u00ecnh th\u00e0nh, sau \u0111\u00f3 t\u1ed5ng h\u1ee3p v\u00e0 ph\u00e1t tri\u1ec3n, cu\u1ed1i c\u00f9ng k\u1ebft t\u1ee7a kh\u1ecfi dung d\u1ecbch. N\u1ebfu n\u1ed3ng \u0111\u1ed9 ch\u1ea5t k\u1ebft t\u1ee7a trong dung d\u1ecbch \u0111\u1ed3ng nh\u1ea5t c\u00f3 th\u1ec3 gi\u1ea3m \u0111i ho\u1eb7c th\u1eadm ch\u00ed t\u1ea1o ra ch\u1eadm th\u00ec dung d\u1ecbch s\u1ebd \u0111\u1ed3ng nh\u1ea5t. M\u1ed9t s\u1ed1 l\u01b0\u1ee3ng l\u1edbn c\u00e1c h\u1ea1t nh\u00e2n tinh th\u1ec3 nh\u1ecf \u0111\u01b0\u1ee3c t\u1ea1o ra v\u00e0 c\u00e1c h\u1ea1t k\u1ebft t\u1ee7a m\u1ecbn h\u00ecnh th\u00e0nh cu\u1ed1i c\u00f9ng s\u1ebd \u0111\u01b0\u1ee3c ph\u00e2n t\u00e1n \u0111\u1ec1u trong dung d\u1ecbch v\u00e0 s\u1ebd duy tr\u00ec tr\u1ea1ng th\u00e1i c\u00e2n b\u1eb1ng trong m\u1ed9t th\u1eddi gian d\u00e0i. Ph\u01b0\u01a1ng ph\u00e1p thu \u0111\u01b0\u1ee3c l\u01b0\u1ee3ng m\u01b0a n\u00e0y \u0111\u01b0\u1ee3c g\u1ecdi l\u00e0 l\u01b0\u1ee3ng m\u01b0a \u0111\u1ed3ng nh\u1ea5t.<\/p>\n

Ph\u01b0\u01a1ng ph\u00e1p Sol-nh\u0169 t\u01b0\u01a1ng-gel<\/p>\n

\u0110\u1ec3 thu \u0111\u01b0\u1ee3c c\u00e1c h\u1ea1t b\u1ed9t h\u00ecnh c\u1ea7u, ng\u01b0\u1eddi ta s\u1eed d\u1ee5ng s\u1ee9c c\u0103ng b\u1ec1 m\u1eb7t gi\u1eefa pha d\u1ea7u v\u00e0 pha n\u01b0\u1edbc \u0111\u1ec3 t\u1ea1o ra nh\u1eefng gi\u1ecdt h\u00ecnh c\u1ea7u c\u1ef1c nh\u1ecf, nh\u1edd \u0111\u00f3 s\u1ef1 h\u00ecnh th\u00e0nh v\u00e0 t\u1ea1o gel c\u1ee7a c\u00e1c h\u1ea1t sol \u0111\u01b0\u1ee3c gi\u1edbi h\u1ea1n \u1edf nh\u1eefng gi\u1ecdt nh\u1ecf v\u00e0 cu\u1ed1i c\u00f9ng thu \u0111\u01b0\u1ee3c k\u1ebft t\u1ee7a h\u00ecnh c\u1ea7u. V\u1eadt r\u1ea5t nh\u1ecf.<\/p>\n

Ph\u01b0\u01a1ng ph\u00e1p th\u1ea3 b\u00f3ng<\/p>\n

Ph\u01b0\u01a1ng ph\u00e1p th\u1ea3 b\u00f3ng l\u00e0 th\u1ea3 alumina sol v\u00e0o m\u1ed9t l\u1edbp d\u1ea7u (th\u01b0\u1eddng l\u00e0 parafin, d\u1ea7u kho\u00e1ng, v.v.) v\u00e0 t\u1ea1o th\u00e0nh c\u00e1c h\u1ea1t sol h\u00ecnh c\u1ea7u nh\u1edd s\u1ee9c c\u0103ng b\u1ec1 m\u1eb7t. Sau \u0111\u00f3 c\u00e1c h\u1ea1t sol \u0111\u01b0\u1ee3c t\u1ea1o gel trong dung d\u1ecbch amoniac, cu\u1ed1i c\u00f9ng l\u00e0 c\u00e1c h\u1ea1t gel \u0111\u01b0\u1ee3c s\u1ea5y kh\u00f4 v\u00e0 nung \u0111\u1ec3 t\u1ea1o th\u00e0nh alumina h\u00ecnh c\u1ea7u.<\/p>\n

C\u00e1c ph\u01b0\u01a1ng ph\u00e1p kh\u00e1c<\/p>\n

Ph\u01b0\u01a1ng ph\u00e1p phun: B\u1ea3n ch\u1ea5t c\u1ee7a vi\u1ec7c \u0111i\u1ec1u ch\u1ebf alumina h\u00ecnh c\u1ea7u b\u1eb1ng ph\u01b0\u01a1ng ph\u00e1p phun l\u00e0 \u0111\u1ea1t \u0111\u01b0\u1ee3c s\u1ef1 chuy\u1ec3n pha trong th\u1eddi gian ng\u1eafn v\u00e0 s\u1eed d\u1ee5ng t\u00e1c d\u1ee5ng c\u1ee7a s\u1ee9c c\u0103ng b\u1ec1 m\u1eb7t \u0111\u1ec3 t\u1ea1o th\u00e0nh h\u00ecnh c\u1ea7u cho s\u1ea3n ph\u1ea9m. Theo \u0111\u1eb7c \u0111i\u1ec3m c\u1ee7a qu\u00e1 tr\u00ecnh chuy\u1ec3n pha, n\u00f3 c\u00f3 th\u1ec3 \u0111\u01b0\u1ee3c chia th\u00e0nh ph\u01b0\u01a1ng ph\u00e1p nhi\u1ec7t ph\u00e2n phun v\u00e0 ph\u01b0\u01a1ng ph\u00e1p s\u1ea5y phun. v\u00e0 ti\u00eam n\u00f3ng ch\u1ea3y.<\/p>\n

Ph\u01b0\u01a1ng ph\u00e1p ph\u00e2n h\u1ee7y kh\u00ed dung: th\u00f4ng th\u01b0\u1eddng nh\u00f4m alkoxide \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng l\u00e0m nguy\u00ean li\u1ec7u th\u00f4, v\u00e0 nh\u00f4m alkoxide d\u1ec5 b\u1ecb th\u1ee7y ph\u00e2n v\u00e0 nhi\u1ec7t ph\u00e2n \u1edf nhi\u1ec7t \u0111\u1ed9 cao, v\u00e0 ph\u01b0\u01a1ng ph\u00e1p v\u1eadt l\u00fd thay \u0111\u1ed5i pha \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng \u0111\u1ec3 l\u00e0m bay h\u01a1i nh\u00f4m alkoxide, sau \u0111\u00f3 ti\u1ebfp x\u00fac v\u1edbi h\u01a1i n\u01b0\u1edbc \u0111\u1ec3 th\u1ee7y ph\u00e2n v\u00e0 nguy\u00ean t\u1eed h\u00f3a, sau \u0111\u00f3 s\u1ea5y kh\u00f4 \u1edf nhi\u1ec7t \u0111\u1ed9 cao ho\u1eb7c nhi\u1ec7t ph\u00e2n tr\u1ef1c ti\u1ebfp \u1edf nhi\u1ec7t \u0111\u1ed9 cao \u0111\u1ec3 \u0111\u1ea1t \u0111\u01b0\u1ee3c s\u1ef1 chuy\u1ec3n \u0111\u1ed5i pha kh\u00ed-l\u1ecfng-r\u1eafn ho\u1eb7c kh\u00ed-r\u1eafn, v\u00e0 cu\u1ed1i c\u00f9ng t\u1ea1o th\u00e0nh b\u1ed9t alumina h\u00ecnh c\u1ea7u.<\/p>\n

B\u1ed9t alumina h\u00ecnh c\u1ea7u si\u00eau m\u1ecbn c\u00f3 gi\u00e1 tr\u1ecb gia t\u0103ng cao v\u00e0 c\u00f3 th\u1ec3 mang l\u1ea1i l\u1ee3i \u00edch kinh t\u1ebf v\u00e0 x\u00e3 h\u1ed9i l\u1edbn h\u01a1n. Trong nh\u1eefng n\u0103m g\u1ea7n \u0111\u00e2y, nhu c\u1ea7u c\u1ee7a n\u00f3 \u0111\u00e3 ti\u1ebfp t\u1ee5c t\u0103ng l\u00ean. Do \u0111\u00f3, qu\u00e1 tr\u00ecnh h\u00ecnh c\u1ea7u h\u00f3a c\u00e1c h\u1ea1t alumina si\u00eau m\u1ecbn c\u00f3 th\u1ec3 c\u1ea3i thi\u1ec7n \u0111\u00e1ng k\u1ec3 hi\u1ec7u su\u1ea5t \u1ee9ng d\u1ee5ng c\u1ee7a s\u1ea3n ph\u1ea9m v\u00e0 mang l\u1ea1i l\u1ee3i \u00edch kinh t\u1ebf to l\u1edbn. Ng\u01b0\u1eddi ta tin r\u1eb1ng th\u1ecb tr\u01b0\u1eddng b\u1ed9t alumina h\u00ecnh c\u1ea7u s\u1ebd m\u1edf r\u1ed9ng h\u01a1n n\u1eefa!<\/p>\n","protected":false},"excerpt":{"rendered":"

V\u1edbi s\u1ef1 ph\u00e1t tri\u1ec3n nhanh ch\u00f3ng c\u1ee7a ng\u00e0nh c\u00f4ng nghi\u1ec7p to\u00e0n c\u1ea7u, b\u1ed9t alumina h\u00ecnh c\u1ea7u \u0111\u00e3 \u0111\u01b0\u1ee3c nghi\u00ean c\u1ee9u r\u1ed9ng r\u00e3i trong 10 n\u0103m qua.<\/p>\n","protected":false},"author":7,"featured_media":130304,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"footnotes":""},"categories":[852],"tags":[],"class_list":["post-130344","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-cong-nghiep-tin-tuc-vi"],"acf":[],"_links":{"self":[{"href":"https:\/\/www.alpapowder.com\/vi\/wp-json\/wp\/v2\/posts\/130344"}],"collection":[{"href":"https:\/\/www.alpapowder.com\/vi\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.alpapowder.com\/vi\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.alpapowder.com\/vi\/wp-json\/wp\/v2\/users\/7"}],"replies":[{"embeddable":true,"href":"https:\/\/www.alpapowder.com\/vi\/wp-json\/wp\/v2\/comments?post=130344"}],"version-history":[{"count":0,"href":"https:\/\/www.alpapowder.com\/vi\/wp-json\/wp\/v2\/posts\/130344\/revisions"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.alpapowder.com\/vi\/wp-json\/wp\/v2\/media\/130304"}],"wp:attachment":[{"href":"https:\/\/www.alpapowder.com\/vi\/wp-json\/wp\/v2\/media?parent=130344"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.alpapowder.com\/vi\/wp-json\/wp\/v2\/categories?post=130344"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.alpapowder.com\/vi\/wp-json\/wp\/v2\/tags?post=130344"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}