Silicon<\/a>, v.v.<\/p>\nC\u00e1c b\u1ed9 ph\u1eadn cacbua silic<\/p>\n
1. C\u00e1c b\u1ed9 ph\u1eadn cacbua silic CVD<\/p>\n
C\u00e1c th\u00e0nh ph\u1ea7n cacbua silic CVD \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng r\u1ed9ng r\u00e3i trong thi\u1ebft b\u1ecb kh\u1eafc, thi\u1ebft b\u1ecb MOCVD, thi\u1ebft b\u1ecb epiticular SiC, thi\u1ebft b\u1ecb x\u1eed l\u00fd nhi\u1ec7t nhanh v\u00e0 c\u00e1c l\u0129nh v\u1ef1c kh\u00e1c.<\/p>\n
Thi\u1ebft b\u1ecb kh\u1eafc: Ph\u00e2n kh\u00fac th\u1ecb tr\u01b0\u1eddng l\u1edbn nh\u1ea5t cho c\u00e1c th\u00e0nh ph\u1ea7n cacbua silic CVD l\u00e0 thi\u1ebft b\u1ecb kh\u1eafc. C\u00e1c th\u00e0nh ph\u1ea7n cacbua silic CVD trong thi\u1ebft b\u1ecb kh\u1eafc bao g\u1ed3m v\u00f2ng l\u1ea5y n\u00e9t, v\u00f2i sen kh\u00ed, khay, v\u00f2ng c\u1ea1nh, v.v. Do kh\u1ea3 n\u0103ng ph\u1ea3n \u1ee9ng v\u00e0 \u0111\u1ed9 d\u1eabn th\u1ea5p c\u1ee7a cacbua silic CVD v\u1edbi kh\u00ed \u0103n m\u00f2n c\u00f3 ch\u1ee9a clo v\u00e0 flo, n\u00f3 tr\u1edf th\u00e0nh v\u1eadt li\u1ec7u l\u00fd t\u01b0\u1edfng cho plasma c\u00e1c th\u00e0nh ph\u1ea7n nh\u01b0 v\u00f2ng l\u1ea5y n\u00e9t trong thi\u1ebft b\u1ecb kh\u1eafc.<\/p>\n
L\u1edbp ph\u1ee7 n\u1ec1n than ch\u00ec: L\u1eafng \u0111\u1ecdng h\u01a1i h\u00f3a h\u1ecdc \u1edf \u00e1p su\u1ea5t th\u1ea5p (CVD) hi\u1ec7n l\u00e0 quy tr\u00ecnh hi\u1ec7u qu\u1ea3 nh\u1ea5t \u0111\u1ec3 chu\u1ea9n b\u1ecb l\u1edbp ph\u1ee7 SiC d\u00e0y \u0111\u1eb7c. \u0110\u1ed9 d\u00e0y c\u1ee7a l\u1edbp ph\u1ee7 CVD-SiC c\u00f3 th\u1ec3 ki\u1ec3m so\u00e1t \u0111\u01b0\u1ee3c v\u00e0 c\u00f3 \u01b0u \u0111i\u1ec3m l\u00e0 t\u00ednh \u0111\u1ed3ng nh\u1ea5t. C\u00e1c \u0111\u1ebf than ch\u00ec \u0111\u01b0\u1ee3c ph\u1ee7 SiC th\u01b0\u1eddng \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng trong thi\u1ebft b\u1ecb l\u1eafng \u0111\u1ecdng h\u01a1i h\u00f3a h\u1ecdc h\u1eefu c\u01a1 kim lo\u1ea1i (MOCVD) \u0111\u1ec3 h\u1ed7 tr\u1ee3 v\u00e0 l\u00e0m n\u00f3ng c\u00e1c ch\u1ea5t n\u1ec1n \u0111\u01a1n tinh th\u1ec3. Ch\u00fang l\u00e0 th\u00e0nh ph\u1ea7n c\u1ed1t l\u00f5i v\u00e0 quan tr\u1ecdng c\u1ee7a thi\u1ebft b\u1ecb MOCVD.<\/p>\n
2. C\u00e1c b\u1ed9 ph\u1eadn cacbua silic thi\u00eau k\u1ebft ph\u1ea3n \u1ee9ng<\/p>\n
\u0110\u1ed1i v\u1edbi v\u1eadt li\u1ec7u SiC thi\u00eau k\u1ebft ph\u1ea3n \u1ee9ng (x\u00e2m nh\u1eadp ph\u1ea3n \u1ee9ng ho\u1eb7c li\u00ean k\u1ebft ph\u1ea3n \u1ee9ng), \u0111\u1ed9 co c\u1ee7a \u0111\u01b0\u1eddng thi\u00eau k\u1ebft c\u00f3 th\u1ec3 \u0111\u01b0\u1ee3c ki\u1ec3m so\u00e1t d\u01b0\u1edbi 1% v\u00e0 nhi\u1ec7t \u0111\u1ed9 thi\u00eau k\u1ebft t\u01b0\u01a1ng \u0111\u1ed1i th\u1ea5p, gi\u00fap gi\u1ea3m \u0111\u00e1ng k\u1ec3 c\u00e1c y\u00eau c\u1ea7u v\u1ec1 ki\u1ec3m so\u00e1t bi\u1ebfn d\u1ea1ng v\u00e0 thi\u1ebft b\u1ecb thi\u00eau k\u1ebft. V\u00ec v\u1eady, c\u00f4ng ngh\u1ec7 n\u00e0y c\u00f3 \u01b0u \u0111i\u1ec3m l\u00e0 d\u1ec5 d\u00e0ng ch\u1ebf t\u1ea1o \u0111\u01b0\u1ee3c c\u00e1c linh ki\u1ec7n c\u00f3 k\u00edch th\u01b0\u1edbc l\u1edbn v\u00e0 \u0111\u00e3 \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng r\u1ed9ng r\u00e3i trong c\u00e1c l\u0129nh v\u1ef1c ch\u1ebf t\u1ea1o c\u1ea5u tr\u00fac quang h\u1ecdc v\u00e0 ch\u00ednh x\u00e1c.<\/p>\n","protected":false},"excerpt":{"rendered":"
Theo c\u1ea5u tr\u00fac tinh th\u1ec3, c\u00f3 nhi\u1ec1u d\u1ea1ng tinh th\u1ec3 c\u1ee7a cacbua silic.<\/p>\n","protected":false},"author":7,"featured_media":131301,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"footnotes":""},"categories":[852],"tags":[],"class_list":["post-131338","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-cong-nghiep-tin-tuc-vi"],"acf":[],"_links":{"self":[{"href":"https:\/\/www.alpapowder.com\/vi\/wp-json\/wp\/v2\/posts\/131338","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.alpapowder.com\/vi\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.alpapowder.com\/vi\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.alpapowder.com\/vi\/wp-json\/wp\/v2\/users\/7"}],"replies":[{"embeddable":true,"href":"https:\/\/www.alpapowder.com\/vi\/wp-json\/wp\/v2\/comments?post=131338"}],"version-history":[{"count":0,"href":"https:\/\/www.alpapowder.com\/vi\/wp-json\/wp\/v2\/posts\/131338\/revisions"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.alpapowder.com\/vi\/wp-json\/wp\/v2\/media\/131301"}],"wp:attachment":[{"href":"https:\/\/www.alpapowder.com\/vi\/wp-json\/wp\/v2\/media?parent=131338"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.alpapowder.com\/vi\/wp-json\/wp\/v2\/categories?post=131338"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.alpapowder.com\/vi\/wp-json\/wp\/v2\/tags?post=131338"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}
![\"\"](\"https:\/\/www.alpapowder.com\/wp-content\/uploads\/2024\/03\/silicon-carbide-powder-1024x683.jpeg\")
<\/p>\n