{"id":134232,"date":"2024-09-09T16:08:02","date_gmt":"2024-09-09T08:08:02","guid":{"rendered":"https:\/\/www.alpapowder.com\/134232\/"},"modified":"2024-09-09T16:08:04","modified_gmt":"2024-09-09T08:08:04","slug":"tam-quan-trong-cua-silicon-nitride-sinx-trong-chip","status":"publish","type":"post","link":"https:\/\/www.alpapowder.com\/vi\/134232\/","title":{"rendered":"T\u1ea7m quan tr\u1ecdng c\u1ee7a Silicon Nitride (SiNx) trong Chip"},"content":{"rendered":"

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Trong s\u1ea3n xu\u1ea5t chip, c\u00f3 m\u1ed9t v\u1eadt li\u1ec7u \u0111\u00f3ng vai tr\u00f2 quan tr\u1ecdng, \u0111\u00f3 l\u00e0 silicon nitride (SiNx). M\u1eb7c d\u00f9 n\u00f3 c\u00f3 th\u1ec3 kh\u00f4ng nh\u1eadn \u0111\u01b0\u1ee3c s\u1ef1 ch\u00fa \u00fd nh\u01b0 c\u00e1c v\u1eadt li\u1ec7u b\u00e1n d\u1eabn n\u1ed5i ti\u1ebfng kh\u00e1c nh\u01b0 silicon<\/a> (Si), gali arsenide (GaAs) ho\u1eb7c gali nitride (GaN), nh\u01b0ng t\u1ea7m quan tr\u1ecdng c\u1ee7a n\u00f3 l\u00e0 kh\u00f4ng th\u1ec3 b\u00e0n c\u00e3i. C\u00f3 th\u1ec3 n\u00f3i r\u1eb1ng h\u1ea7u h\u1ebft c\u00e1c chip s\u1ebd s\u1eed d\u1ee5ng v\u1eadt li\u1ec7u n\u00e0y.<\/p>\n

Trong ng\u00e0nh c\u00f4ng nghi\u1ec7p b\u00e1n d\u1eabn, silicon<\/a> nitride \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng trong nhi\u1ec1u \u1ee9ng d\u1ee5ng kh\u00e1c nhau th\u01b0\u1eddng kh\u00f4ng \u0111\u1ed3ng nh\u1ea5t, th\u01b0\u1eddng \u0111\u01b0\u1ee3c bi\u1ec3u th\u1ecb b\u1eb1ng SiNx. SiNx l\u00e0 v\u1eadt li\u1ec7u v\u00f4 \u0111\u1ecbnh h\u00ecnh c\u00f3 c\u00e1c t\u00ednh ch\u1ea5t ph\u1ee5 thu\u1ed9c v\u00e0o t\u1ef7 l\u1ec7 nit\u01a1 so v\u1edbi silicon<\/a>, t\u1ee9c l\u00e0 gi\u00e1 tr\u1ecb x. Khi gi\u00e1 tr\u1ecb x thay \u0111\u1ed5i, c\u00e1c t\u00ednh ch\u1ea5t v\u1eadt l\u00fd v\u00e0 h\u00f3a h\u1ecdc c\u1ee7a silicon<\/a> nitride c\u0169ng s\u1ebd thay \u0111\u1ed5i. Silicon<\/a> nitride c\u00f3 nhi\u1ec1u d\u1ea1ng, bao g\u1ed3m Si3N4, Si2N2, SiN, v.v.<\/p>\n

Si3N4 l\u00e0 v\u1eadt li\u1ec7u tinh th\u1ec3, c\u00f3 ngh\u0129a l\u00e0 t\u1ef7 l\u1ec7 silicon<\/a> so v\u1edbi nit\u01a1 l\u00e0 c\u1ed1 \u0111\u1ecbnh. Khi gi\u00e1 tr\u1ecb x b\u1eb1ng 4\/3, SiNx b\u1eb1ng Si3N4. Tuy nhi\u00ean, trong c\u00e1c \u1ee9ng d\u1ee5ng th\u1ef1c t\u1ebf, SiNx th\u01b0\u1eddng kh\u00f4ng c\u1ed1 \u0111\u1ecbnh v\u00e0 t\u1ef7 l\u1ec7 silicon<\/a> so v\u1edbi nit\u01a1 c\u1ee7a n\u00f3 c\u00f3 th\u1ec3 \u0111\u01b0\u1ee3c \u0111i\u1ec1u ch\u1ec9nh b\u1eb1ng c\u00e1ch thay \u0111\u1ed5i c\u00e1c th\u00f4ng s\u1ed1 c\u1ee7a quy tr\u00ecnh PVD ho\u1eb7c CVD.<\/p>\n

Silic nitride c\u00f3 \u0111\u1eb7c t\u00ednh c\u00e1ch \u0111i\u1ec7n tuy\u1ec7t v\u1eddi, v\u1edbi \u0111i\u1ec7n tr\u1edf su\u1ea5t l\u00ean \u0111\u1ebfn 10^14 \u03a9\u00b7cm, v\u01b0\u1ee3t xa m\u1ed9t s\u1ed1 v\u1eadt li\u1ec7u c\u00e1ch \u0111i\u1ec7n th\u00f4ng th\u01b0\u1eddng nh\u01b0 silicon<\/a> oxit (SiO2). H\u1eb1ng s\u1ed1 \u0111i\u1ec7n m\u00f4i th\u1ea5p c\u1ee7a n\u00f3 khi\u1ebfn n\u00f3 tr\u1edf th\u00e0nh l\u1edbp c\u00e1ch ly l\u00fd t\u01b0\u1edfng trong c\u00e1c \u1ee9ng d\u1ee5ng vi s\u00f3ng v\u00e0 t\u1ea7n s\u1ed1 v\u00f4 tuy\u1ebfn. L\u1edbp silicon<\/a> nitride c\u0169ng ho\u1ea1t \u0111\u1ed9ng nh\u01b0 m\u1ed9t r\u00e0o c\u1ea3n \u0111\u1ed1i v\u1edbi s\u1ef1 khu\u1ebfch t\u00e1n t\u1ea1p ch\u1ea5t trong chip. N\u00f3 c\u00f3 th\u1ec3 ng\u0103n c\u00e1c t\u1ea1p ch\u1ea5t nh\u01b0 boron v\u00e0 ph\u1ed1t pho thay \u0111\u1ed5i c\u00e1c \u0111\u1eb7c t\u00ednh c\u1ee7a thi\u1ebft b\u1ecb th\u00f4ng qua s\u1ef1 khu\u1ebfch t\u00e1n. Ngo\u00e0i ra, n\u00f3 c\u0169ng c\u00f3 th\u1ec3 ng\u0103n ch\u1eb7n s\u1ef1 khu\u1ebfch t\u00e1n c\u1ee7a c\u00e1c ion kim lo\u1ea1i \u0111\u1ec3 ng\u0103n ng\u1eeba c\u00e1c l\u1ed7i nh\u01b0 \u0111o\u1ea3n m\u1ea1ch.<\/p>\n

Silic nitride c\u00f3 \u0111\u1ed9 \u1ed5n \u0111\u1ecbnh nhi\u1ec7t tuy\u1ec7t v\u1eddi, \u0111\u01b0\u1ee3c x\u00e1c \u0111\u1ecbnh b\u1edfi c\u00e1c \u0111\u1eb7c t\u00ednh h\u00f3a h\u1ecdc v\u00e0 c\u1ea5u tr\u00fac tinh th\u1ec3 \u0111\u1eb7c bi\u1ec7t c\u1ee7a n\u00f3. N\u00f3 c\u00f3 th\u1ec3 duy tr\u00ec \u1ed5n \u0111\u1ecbnh trong m\u00f4i tr\u01b0\u1eddng nhi\u1ec7t \u0111\u1ed9 cao m\u00e0 kh\u00f4ng b\u1ecb ph\u00e2n h\u1ee7y h\u00f3a h\u1ecdc ho\u1eb7c thay \u0111\u1ed5i v\u1eadt l\u00fd nh\u01b0 c\u00e1c v\u1eadt li\u1ec7u kh\u00e1c. \u0110\u00f3 l\u00e0 v\u00ec trong c\u1ea5u tr\u00fac tinh th\u1ec3 c\u1ee7a silicon<\/a> nitride, m\u1ed7i nguy\u00ean t\u1eed silicon \u0111\u01b0\u1ee3c k\u1ebft h\u1ee3p v\u1edbi b\u1ed1n nguy\u00ean t\u1eed nit\u01a1 d\u01b0\u1edbi d\u1ea1ng t\u1ee9 di\u1ec7n, v\u00e0 m\u1ed7i nguy\u00ean t\u1eed nit\u01a1 c\u0169ng \u0111\u01b0\u1ee3c k\u1ebft h\u1ee3p v\u1edbi b\u1ed1n nguy\u00ean t\u1eed silicon d\u01b0\u1edbi d\u1ea1ng t\u1ee9 di\u1ec7n. C\u1ea5u tr\u00fac n\u00e0y l\u00e0m cho m\u1ea1ng tinh th\u1ec3 c\u1ee7a silicon<\/a> nitride c\u1ef1c k\u1ef3 \u1ed5n \u0111\u1ecbnh v\u00e0 kh\u00f4ng d\u1ec5 bi\u1ebfn d\u1ea1ng. Do \u0111\u00f3, n\u00f3 \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng l\u00e0m l\u1edbp c\u00e1ch \u0111i\u1ec7n c\u1ed5ng khi s\u1ea3n xu\u1ea5t b\u00f3ng b\u00e1n d\u1eabn c\u00f3 \u0111\u1ed9 linh \u0111\u1ed9ng \u0111i\u1ec7n t\u1eed cao (HEMT).<\/p>\n

\u01afu \u0111i\u1ec3m c\u1ee7a SiNx so v\u1edbi SiO2<\/a> l\u00e0 g\u00ec?<\/p>\n

\u0110\u1ed9 \u1ed5n \u0111\u1ecbnh nhi\u1ec7t t\u1ed1t h\u01a1n, \u0111\u1ed9 c\u1ee9ng c\u1ee9ng h\u01a1n v\u00e0 kh\u00f3 kh\u1eafc h\u01a1n.<\/p>\n","protected":false},"excerpt":{"rendered":"

Trong ng\u00e0nh c\u00f4ng nghi\u1ec7p b\u00e1n d\u1eabn, silicon nitride \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng trong nhi\u1ec1u \u1ee9ng d\u1ee5ng kh\u00e1c nhau th\u01b0\u1eddng kh\u00f4ng \u0111\u1ed3ng nh\u1ea5t, th\u01b0\u1eddng \u0111\u01b0\u1ee3c bi\u1ec3u th\u1ecb b\u1eb1ng SiNx.<\/p>\n","protected":false},"author":7,"featured_media":134195,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"footnotes":""},"categories":[852],"tags":[],"class_list":["post-134232","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-cong-nghiep-tin-tuc-vi"],"acf":[],"_links":{"self":[{"href":"https:\/\/www.alpapowder.com\/vi\/wp-json\/wp\/v2\/posts\/134232"}],"collection":[{"href":"https:\/\/www.alpapowder.com\/vi\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.alpapowder.com\/vi\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.alpapowder.com\/vi\/wp-json\/wp\/v2\/users\/7"}],"replies":[{"embeddable":true,"href":"https:\/\/www.alpapowder.com\/vi\/wp-json\/wp\/v2\/comments?post=134232"}],"version-history":[{"count":2,"href":"https:\/\/www.alpapowder.com\/vi\/wp-json\/wp\/v2\/posts\/134232\/revisions"}],"predecessor-version":[{"id":134234,"href":"https:\/\/www.alpapowder.com\/vi\/wp-json\/wp\/v2\/posts\/134232\/revisions\/134234"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.alpapowder.com\/vi\/wp-json\/wp\/v2\/media\/134195"}],"wp:attachment":[{"href":"https:\/\/www.alpapowder.com\/vi\/wp-json\/wp\/v2\/media?parent=134232"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.alpapowder.com\/vi\/wp-json\/wp\/v2\/categories?post=134232"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.alpapowder.com\/vi\/wp-json\/wp\/v2\/tags?post=134232"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}