{"id":134807,"date":"2024-10-30T13:18:38","date_gmt":"2024-10-30T05:18:38","guid":{"rendered":"https:\/\/www.alpapowder.com\/134807\/"},"modified":"2024-10-30T13:18:40","modified_gmt":"2024-10-30T05:18:40","slug":"gom-su-silicon-carbide-ung-dung-trong-nganh-quang-dien","status":"publish","type":"post","link":"https:\/\/www.alpapowder.com\/vi\/134807\/","title":{"rendered":"G\u1ed1m s\u1ee9 silicon carbide: \u1ee9ng d\u1ee5ng trong ng\u00e0nh quang \u0111i\u1ec7n"},"content":{"rendered":"

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G\u1ed1m silicon carbide c\u00f3 \u0111\u1ed9 b\u1ec1n c\u01a1 h\u1ecdc t\u1ed1t, \u0111\u1ed9 \u1ed5n \u0111\u1ecbnh nhi\u1ec7t, kh\u1ea3 n\u0103ng ch\u1ecbu nhi\u1ec7t \u0111\u1ed9 cao, kh\u1ea3 n\u0103ng ch\u1ed1ng oxy h\u00f3a, kh\u1ea3 n\u0103ng ch\u1ed1ng s\u1ed1c nhi\u1ec7t v\u00e0 kh\u1ea3 n\u0103ng ch\u1ed1ng \u0103n m\u00f2n h\u00f3a h\u1ecdc, \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng r\u1ed9ng r\u00e3i trong c\u00e1c l\u0129nh v\u1ef1c n\u00f3ng nh\u01b0 luy\u1ec7n kim, m\u00e1y m\u00f3c, n\u0103ng l\u01b0\u1ee3ng m\u1edbi, v\u1eadt li\u1ec7u x\u00e2y d\u1ef1ng v\u00e0 h\u00f3a ch\u1ea5t. Hi\u1ec7u su\u1ea5t c\u1ee7a n\u00f3 c\u0169ng \u0111\u1ee7 \u0111\u1ec3 khu\u1ebfch t\u00e1n c\u00e1c t\u1ebf b\u00e0o TOPcon trong s\u1ea3n xu\u1ea5t quang \u0111i\u1ec7n, LPCVD (l\u1eafng \u0111\u1ecdng h\u01a1i h\u00f3a h\u1ecdc \u00e1p su\u1ea5t th\u1ea5p), PECVD (l\u1eafng \u0111\u1ecdng h\u01a1i h\u00f3a h\u1ecdc plasma) v\u00e0 c\u00e1c li\u00ean k\u1ebft quy tr\u00ecnh nhi\u1ec7t kh\u00e1c.<\/p>\n

So v\u1edbi v\u1eadt li\u1ec7u th\u1ea1ch anh truy\u1ec1n th\u1ed1ng, gi\u00e1 \u0111\u1ee1 thuy\u1ec1n, thuy\u1ec1n v\u00e0 ph\u1ee5 ki\u1ec7n \u1ed1ng l\u00e0m b\u1eb1ng v\u1eadt li\u1ec7u g\u1ed1m silicon<\/a> carbide c\u00f3 \u0111\u1ed9 b\u1ec1n cao h\u01a1n, \u0111\u1ed9 \u1ed5n \u0111\u1ecbnh nhi\u1ec7t t\u1ed1t h\u01a1n, kh\u00f4ng b\u1ecb bi\u1ebfn d\u1ea1ng \u1edf nhi\u1ec7t \u0111\u1ed9 cao v\u00e0 tu\u1ed5i th\u1ecd cao h\u01a1n 5 l\u1ea7n so v\u1edbi v\u1eadt li\u1ec7u th\u1ea1ch anh. Ch\u00fang c\u00f3 th\u1ec3 gi\u1ea3m \u0111\u00e1ng k\u1ec3 chi ph\u00ed s\u1eed d\u1ee5ng v\u00e0 t\u1ed5n th\u1ea5t n\u0103ng l\u01b0\u1ee3ng do b\u1ea3o tr\u00ec v\u00e0 th\u1eddi gian ng\u1eebng ho\u1ea1t \u0111\u1ed9ng. Ch\u00fang c\u00f3 l\u1ee3i th\u1ebf r\u00f5 r\u00e0ng v\u1ec1 chi ph\u00ed v\u00e0 nhi\u1ec1u lo\u1ea1i nguy\u00ean li\u1ec7u th\u00f4.<\/p>\n

Trong s\u1ed1 \u0111\u00f3, silicon<\/a> carbide li\u00ean k\u1ebft ph\u1ea3n \u1ee9ng (RBSC) c\u00f3 nhi\u1ec7t \u0111\u1ed9 thi\u00eau k\u1ebft th\u1ea5p, chi ph\u00ed s\u1ea3n xu\u1ea5t th\u1ea5p v\u00e0 \u0111\u1ed9 \u0111\u1eb7c v\u1eadt li\u1ec7u cao. \u0110\u1eb7c bi\u1ec7t, h\u1ea7u nh\u01b0 kh\u00f4ng c\u00f3 hi\u1ec7n t\u01b0\u1ee3ng co ng\u00f3t th\u1ec3 t\u00edch trong qu\u00e1 tr\u00ecnh thi\u00eau k\u1ebft ph\u1ea3n \u1ee9ng. N\u00f3 \u0111\u1eb7c bi\u1ec7t ph\u00f9 h\u1ee3p \u0111\u1ec3 ch\u1ebf t\u1ea1o c\u00e1c b\u1ed9 ph\u1eadn k\u1ebft c\u1ea5u c\u00f3 k\u00edch th\u01b0\u1edbc l\u1edbn v\u00e0 h\u00ecnh d\u1ea1ng ph\u1ee9c t\u1ea1p. Do \u0111\u00f3, n\u00f3 ph\u00f9 h\u1ee3p nh\u1ea5t \u0111\u1ec3 s\u1ea3n xu\u1ea5t c\u00e1c s\u1ea3n ph\u1ea9m c\u00f3 k\u00edch th\u01b0\u1edbc l\u1edbn v\u00e0 ph\u1ee9c t\u1ea1p nh\u01b0 gi\u00e1 \u0111\u1ee1 thuy\u1ec1n, thuy\u1ec1n, m\u00e1i ch\u00e8o c\u00f4ng x\u00f4n, \u1ed1ng l\u00f2, v.v.<\/p>\n

Thuy\u1ec1n silicon<\/a> carbide c\u0169ng c\u00f3 tri\u1ec3n v\u1ecdng ph\u00e1t tri\u1ec3n l\u1edbn trong t\u01b0\u01a1ng lai. B\u1ea5t k\u1ec3 quy tr\u00ecnh LPCVD hay quy tr\u00ecnh khu\u1ebfch t\u00e1n bo, tu\u1ed5i th\u1ecd c\u1ee7a thuy\u1ec1n th\u1ea1ch anh t\u01b0\u01a1ng \u0111\u1ed1i th\u1ea5p v\u00e0 h\u1ec7 s\u1ed1 gi\u00e3n n\u1edf nhi\u1ec7t c\u1ee7a v\u1eadt li\u1ec7u th\u1ea1ch anh kh\u00f4ng nh\u1ea5t qu\u00e1n v\u1edbi v\u1eadt li\u1ec7u silicon<\/a> carbide. Do \u0111\u00f3, d\u1ec5 c\u00f3 \u0111\u1ed9 l\u1ec7ch trong qu\u00e1 tr\u00ecnh kh\u1edbp v\u1edbi gi\u00e1 \u0111\u1ee1 thuy\u1ec1n silicon<\/a> carbide \u1edf nhi\u1ec7t \u0111\u1ed9 cao, c\u00f3 th\u1ec3 d\u1eabn \u0111\u1ebfn thuy\u1ec1n b\u1ecb rung ho\u1eb7c th\u1eadm ch\u00ed v\u1ee1. Thuy\u1ec1n silicon<\/a> carbide \u00e1p d\u1ee5ng quy tr\u00ecnh \u0111\u00fac t\u00edch h\u1ee3p v\u00e0 quy tr\u00ecnh x\u1eed l\u00fd t\u1ed5ng th\u1ec3. Y\u00eau c\u1ea7u v\u1ec1 dung sai h\u00ecnh d\u1ea1ng v\u00e0 v\u1ecb tr\u00ed c\u1ee7a n\u00f3 cao v\u00e0 n\u00f3 h\u1ee3p t\u00e1c t\u1ed1t h\u01a1n v\u1edbi gi\u00e1 \u0111\u1ee1 thuy\u1ec1n silicon<\/a> carbide. Ngo\u00e0i ra, silicon<\/a> carbide c\u00f3 \u0111\u1ed9 b\u1ec1n cao v\u00e0 kh\u1ea3 n\u0103ng thuy\u1ec1n b\u1ecb v\u1ee1 do va ch\u1ea1m c\u1ee7a con ng\u01b0\u1eddi \u00edt h\u01a1n nhi\u1ec1u so v\u1edbi thuy\u1ec1n th\u1ea1ch anh.<\/p>\n

\u1ed0ng l\u00f2 l\u00e0 th\u00e0nh ph\u1ea7n truy\u1ec1n nhi\u1ec7t ch\u00ednh c\u1ee7a l\u00f2, \u0111\u00f3ng vai tr\u00f2 l\u00e0m k\u00edn v\u00e0 truy\u1ec1n nhi\u1ec7t \u0111\u1ed3ng \u0111\u1ec1u. So v\u1edbi \u1ed1ng l\u00f2 th\u1ea1ch anh, \u1ed1ng l\u00f2 silicon<\/a> carbide c\u00f3 \u0111\u1ed9 d\u1eabn nhi\u1ec7t t\u1ed1t, gia nhi\u1ec7t \u0111\u1ed3ng \u0111\u1ec1u v\u00e0 \u0111\u1ed9 \u1ed5n \u0111\u1ecbnh nhi\u1ec7t t\u1ed1t. Tu\u1ed5i th\u1ecd cao h\u01a1n 5 l\u1ea7n so v\u1edbi \u1ed1ng th\u1ea1ch anh. Tuy nhi\u00ean, \u0111\u1ed9 kh\u00f3 ch\u1ebf t\u1ea1o c\u1ee7a \u1ed1ng l\u00f2 silicon<\/a> carbide r\u1ea5t cao v\u00e0 t\u1ef7 l\u1ec7 n\u0103ng su\u1ea5t c\u0169ng r\u1ea5t th\u1ea5p. N\u00f3 v\u1eabn \u0111ang trong giai \u0111o\u1ea1n nghi\u00ean c\u1ee9u v\u00e0 ph\u00e1t tri\u1ec3n v\u00e0 v\u1eabn ch\u01b0a \u0111\u01b0\u1ee3c s\u1ea3n xu\u1ea5t h\u00e0ng lo\u1ea1t.<\/p>\n

Trong m\u1ed9t so s\u00e1nh to\u00e0n di\u1ec7n, cho d\u00f9 v\u1ec1 hi\u1ec7u su\u1ea5t s\u1ea3n ph\u1ea9m hay chi ph\u00ed s\u1eed d\u1ee5ng, v\u1eadt li\u1ec7u g\u1ed1m silicon<\/a> carbide c\u00f3 nhi\u1ec1u \u01b0u \u0111i\u1ec3m h\u01a1n v\u1eadt li\u1ec7u th\u1ea1ch anh \u1edf m\u1ed9t s\u1ed1 kh\u00eda c\u1ea1nh c\u1ee7a l\u0129nh v\u1ef1c pin m\u1eb7t tr\u1eddi. Vi\u1ec7c \u1ee9ng d\u1ee5ng v\u1eadt li\u1ec7u g\u1ed1m silicon<\/a> carbide trong ng\u00e0nh c\u00f4ng nghi\u1ec7p quang \u0111i\u1ec7n \u0111\u00e3 gi\u00fap c\u00e1c c\u00f4ng ty quang \u0111i\u1ec7n gi\u1ea3m chi ph\u00ed \u0111\u1ea7u t\u01b0 v\u1eadt li\u1ec7u ph\u1ee5 tr\u1ee3 v\u00e0 n\u00e2ng cao ch\u1ea5t l\u01b0\u1ee3ng s\u1ea3n ph\u1ea9m c\u0169ng nh\u01b0 kh\u1ea3 n\u0103ng c\u1ea1nh tranh. Trong t\u01b0\u01a1ng lai, v\u1edbi vi\u1ec7c \u1ee9ng d\u1ee5ng r\u1ed9ng r\u00e3i c\u00e1c \u1ed1ng l\u00f2 silicon<\/a> carbide k\u00edch th\u01b0\u1edbc l\u1edbn, thuy\u1ec1n silicon carbide c\u00f3 \u0111\u1ed9 tinh khi\u1ebft cao v\u00e0 gi\u00e1 \u0111\u1ee1 thuy\u1ec1n, \u0111\u1ed3ng th\u1eddi li\u00ean t\u1ee5c gi\u1ea3m chi ph\u00ed, vi\u1ec7c \u1ee9ng d\u1ee5ng v\u1eadt li\u1ec7u g\u1ed1m silicon carbide trong l\u0129nh v\u1ef1c pin quang \u0111i\u1ec7n s\u1ebd tr\u1edf th\u00e0nh y\u1ebfu t\u1ed1 then ch\u1ed1t trong vi\u1ec7c n\u00e2ng cao hi\u1ec7u qu\u1ea3 chuy\u1ec3n \u0111\u1ed5i n\u0103ng l\u01b0\u1ee3ng \u00e1nh s\u00e1ng v\u00e0 gi\u1ea3m chi ph\u00ed c\u00f4ng nghi\u1ec7p trong l\u0129nh v\u1ef1c ph\u00e1t \u0111i\u1ec7n quang \u0111i\u1ec7n, \u0111\u1ed3ng th\u1eddi c\u00f3 t\u00e1c \u0111\u1ed9ng quan tr\u1ecdng \u0111\u1ebfn s\u1ef1 ph\u00e1t tri\u1ec3n n\u0103ng l\u01b0\u1ee3ng m\u1edbi quang \u0111i\u1ec7n.<\/p>\n","protected":false},"excerpt":{"rendered":"

Vi\u1ec7c \u1ee9ng d\u1ee5ng v\u1eadt li\u1ec7u g\u1ed1m silicon carbide trong ng\u00e0nh c\u00f4ng nghi\u1ec7p quang \u0111i\u1ec7n \u0111\u00e3 gi\u00fap c\u00e1c c\u00f4ng ty quang \u0111i\u1ec7n gi\u1ea3m chi ph\u00ed \u0111\u1ea7u t\u01b0 v\u1eadt li\u1ec7u ph\u1ee5 tr\u1ee3, n\u00e2ng cao ch\u1ea5t l\u01b0\u1ee3ng s\u1ea3n ph\u1ea9m v\u00e0 kh\u1ea3 n\u0103ng c\u1ea1nh tranh.<\/p>\n","protected":false},"author":7,"featured_media":134770,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"footnotes":""},"categories":[852],"tags":[],"class_list":["post-134807","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-cong-nghiep-tin-tuc-vi"],"acf":[],"_links":{"self":[{"href":"https:\/\/www.alpapowder.com\/vi\/wp-json\/wp\/v2\/posts\/134807","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.alpapowder.com\/vi\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.alpapowder.com\/vi\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.alpapowder.com\/vi\/wp-json\/wp\/v2\/users\/7"}],"replies":[{"embeddable":true,"href":"https:\/\/www.alpapowder.com\/vi\/wp-json\/wp\/v2\/comments?post=134807"}],"version-history":[{"count":1,"href":"https:\/\/www.alpapowder.com\/vi\/wp-json\/wp\/v2\/posts\/134807\/revisions"}],"predecessor-version":[{"id":134808,"href":"https:\/\/www.alpapowder.com\/vi\/wp-json\/wp\/v2\/posts\/134807\/revisions\/134808"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.alpapowder.com\/vi\/wp-json\/wp\/v2\/media\/134770"}],"wp:attachment":[{"href":"https:\/\/www.alpapowder.com\/vi\/wp-json\/wp\/v2\/media?parent=134807"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.alpapowder.com\/vi\/wp-json\/wp\/v2\/categories?post=134807"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.alpapowder.com\/vi\/wp-json\/wp\/v2\/tags?post=134807"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}