{"id":135649,"date":"2025-03-25T13:46:46","date_gmt":"2025-03-25T05:46:46","guid":{"rendered":"https:\/\/www.alpapowder.com\/135649\/"},"modified":"2025-03-25T13:46:48","modified_gmt":"2025-03-25T05:46:48","slug":"sau-quy-trinh-san-xuat-thuy-tinh-thach-anh-co-do-tinh-khiet-cao","status":"publish","type":"post","link":"https:\/\/www.alpapowder.com\/vi\/135649\/","title":{"rendered":"S\u00e1u quy tr\u00ecnh s\u1ea3n xu\u1ea5t th\u1ee7y tinh th\u1ea1ch anh c\u00f3 \u0111\u1ed9 tinh khi\u1ebft cao"},"content":{"rendered":"

\"\"<\/p>\n

Th\u1ee7y tinh th\u1ea1ch anh c\u00f3 \u0111\u1ed9 tinh khi\u1ebft cao, \u0111\u1ed9 truy\u1ec1n quang ph\u1ed5 cao, h\u1ec7 s\u1ed1 gi\u00e3n n\u1edf nhi\u1ec7t th\u1ea5p v\u00e0 kh\u1ea3 n\u0103ng ch\u1ed1ng s\u1ed1c nhi\u1ec7t, \u0103n m\u00f2n v\u00e0 b\u1ee9c x\u1ea1 c\u1ef1c t\u00edm s\u00e2u tuy\u1ec7t v\u1eddi. N\u00f3 \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng r\u1ed9ng r\u00e3i trong c\u00e1c l\u0129nh v\u1ef1c s\u1ea3n xu\u1ea5t c\u00f4ng nghi\u1ec7p cao c\u1ea5p nh\u01b0 quang h\u1ecdc, h\u00e0ng kh\u00f4ng v\u0169 tr\u1ee5 v\u00e0 ch\u1ea5t b\u00e1n d\u1eabn.<\/p>\n

Th\u1ee7y tinh th\u1ea1ch anh c\u00f3 th\u1ec3 \u0111\u01b0\u1ee3c ph\u00e2n lo\u1ea1i theo quy tr\u00ecnh ch\u1ebf t\u1ea1o. C\u00f3 hai lo\u1ea1i nguy\u00ean li\u1ec7u ch\u00ednh \u0111\u1ec3 ch\u1ebf t\u1ea1o th\u1ee7y tinh th\u1ea1ch anh. Lo\u1ea1i th\u1ee9 nh\u1ea5t l\u00e0 c\u00e1t th\u1ea1ch anh c\u00f3 \u0111\u1ed9 tinh khi\u1ebft cao, \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng \u0111\u1ec3 n\u1ea5u ch\u1ea3y \u0111i\u1ec7n v\u00e0 tinh ch\u1ebf kh\u00ed \u0111\u1ec3 ch\u1ebf t\u1ea1o th\u1ee7y tinh th\u1ea1ch anh n\u00f3ng ch\u1ea3y \u1edf nhi\u1ec7t \u0111\u1ed9 cao v\u01b0\u1ee3t qu\u00e1 1800\u00b0C; lo\u1ea1i th\u1ee9 hai l\u00e0 h\u1ee3p ch\u1ea5t ch\u1ee9a silicon<\/a>, \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng \u0111\u1ec3 ch\u1ebf t\u1ea1o th\u1ee7y tinh th\u1ea1ch anh t\u1ed5ng h\u1ee3p th\u00f4ng qua c\u00e1c ph\u1ea3n \u1ee9ng h\u00f3a h\u1ecdc.<\/p>\n

Ph\u01b0\u01a1ng ph\u00e1p n\u1ea5u ch\u1ea3y \u0111i\u1ec7n<\/p>\n

Ph\u01b0\u01a1ng ph\u00e1p n\u1ea5u ch\u1ea3y \u0111i\u1ec7n l\u00e0 l\u00e0m tan ch\u1ea3y nguy\u00ean li\u1ec7u th\u1ea1ch anh d\u1ea1ng b\u1ed9t trong n\u1ed3i n\u1ea5u b\u1eb1ng c\u00e1ch nung \u0111i\u1ec7n, sau \u0111\u00f3 t\u1ea1o th\u00e0nh th\u1ee7y tinh th\u1ea1ch anh th\u00f4ng qua qu\u00e1 tr\u00ecnh th\u1ee7y tinh h\u00f3a l\u00e0m ngu\u1ed9i nhanh. C\u00e1c ph\u01b0\u01a1ng ph\u00e1p gia nhi\u1ec7t ch\u00ednh bao g\u1ed3m \u0111i\u1ec7n tr\u1edf, h\u1ed3 quang v\u00e0 c\u1ea3m \u1ee9ng t\u1ea7n s\u1ed1 trung b\u00ecnh.<\/p>\n

Ph\u01b0\u01a1ng ph\u00e1p tinh ch\u1ebf kh\u00ed<\/p>\n

Trong c\u00f4ng nghi\u1ec7p, ph\u01b0\u01a1ng ph\u00e1p tinh ch\u1ebf kh\u00ed ra \u0111\u1eddi mu\u1ed9n h\u01a1n m\u1ed9t ch\u00fat so v\u1edbi ph\u01b0\u01a1ng ph\u00e1p n\u1ea5u ch\u1ea3y \u0111i\u1ec7n. N\u00f3 s\u1eed d\u1ee5ng ng\u1ecdn l\u1eeda hydro-oxy \u0111\u1ec3 l\u00e0m tan ch\u1ea3y th\u1ea1ch anh t\u1ef1 nhi\u00ean, sau \u0111\u00f3 d\u1ea7n d\u1ea7n t\u00edch t\u1ee5 tr\u00ean b\u1ec1 m\u1eb7t m\u1ee5c ti\u00eau th\u1ee7y tinh th\u1ea1ch anh. Th\u1ee7y tinh th\u1ea1ch anh n\u00f3ng ch\u1ea3y \u0111\u01b0\u1ee3c s\u1ea3n xu\u1ea5t b\u1eb1ng ph\u01b0\u01a1ng ph\u00e1p tinh ch\u1ebf kh\u00ed ch\u1ee7 y\u1ebfu \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng cho c\u00e1c ngu\u1ed3n s\u00e1ng \u0111i\u1ec7n, ng\u00e0nh c\u00f4ng nghi\u1ec7p b\u00e1n d\u1eabn, \u0111\u00e8n xenon h\u00ecnh c\u1ea7u, v.v. V\u00e0o nh\u1eefng ng\u00e0y \u0111\u1ea7u, c\u00e1c \u1ed1ng th\u1ee7y tinh th\u1ea1ch anh trong su\u1ed1t c\u1ee1 l\u1edbn v\u00e0 n\u1ed3i n\u1ea5u ch\u1ea3y \u0111\u01b0\u1ee3c n\u1ea5u ch\u1ea3y tr\u1ef1c ti\u1ebfp b\u1eb1ng c\u00e1t th\u1ea1ch anh c\u00f3 \u0111\u1ed9 tinh khi\u1ebft cao tr\u00ean thi\u1ebft b\u1ecb \u0111\u1eb7c bi\u1ec7t s\u1eed d\u1ee5ng ng\u1ecdn l\u1eeda hydro-oxy. Hi\u1ec7n nay, ph\u01b0\u01a1ng ph\u00e1p tinh ch\u1ebf kh\u00ed th\u01b0\u1eddng \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng \u0111\u1ec3 ch\u1ebf t\u1ea1o th\u1ecfi th\u1ea1ch anh, sau \u0111\u00f3 c\u00e1c th\u1ecfi th\u1ea1ch anh \u0111\u01b0\u1ee3c x\u1eed l\u00fd l\u1ea1nh ho\u1eb7c n\u00f3ng \u0111\u1ec3 t\u1ea1o ra c\u00e1c s\u1ea3n ph\u1ea9m th\u1ee7y tinh th\u1ea1ch anh c\u1ea7n thi\u1ebft.<\/p>\n

Ph\u01b0\u01a1ng ph\u00e1p CVD<\/p>\n

Nguy\u00ean l\u00fd c\u1ee7a ph\u01b0\u01a1ng ph\u00e1p CVD l\u00e0 \u0111un n\u00f3ng ch\u1ea5t l\u1ecfng d\u1ec5 bay h\u01a1i SiCl4 \u0111\u1ec3 bi\u1ebfn n\u00f3 th\u00e0nh kh\u00ed, sau \u0111\u00f3 cho SiCl4 d\u1ea1ng kh\u00ed \u0111i v\u00e0o ng\u1ecdn l\u1eeda hydro-oxy \u0111\u01b0\u1ee3c h\u00ecnh th\u00e0nh do qu\u00e1 tr\u00ecnh \u0111\u1ed1t ch\u00e1y hydro v\u00e0 oxy d\u01b0\u1edbi s\u1ef1 d\u1eabn \u0111\u1ed9ng c\u1ee7a kh\u00ed mang (O2), ph\u1ea3n \u1ee9ng v\u1edbi h\u01a1i n\u01b0\u1edbc \u1edf nhi\u1ec7t \u0111\u1ed9 cao \u0111\u1ec3 t\u1ea1o th\u00e0nh c\u00e1c h\u1ea1t v\u00f4 \u0111\u1ecbnh h\u00ecnh, l\u1eafng \u0111\u1ecdng tr\u00ean ch\u1ea5t n\u1ec1n l\u1eafng \u0111\u1ecdng quay, sau \u0111\u00f3 n\u00f3ng ch\u1ea3y \u1edf nhi\u1ec7t \u0111\u1ed9 cao \u0111\u1ec3 t\u1ea1o th\u00e0nh th\u1ee7y tinh th\u1ea1ch anh.<\/p>\n

Ph\u01b0\u01a1ng ph\u00e1p PCVD<\/p>\n

Quy tr\u00ecnh PCVD l\u1ea7n \u0111\u1ea7u ti\u00ean \u0111\u01b0\u1ee3c Corning \u0111\u1ec1 xu\u1ea5t v\u00e0o nh\u1eefng n\u0103m 1960. Quy tr\u00ecnh n\u00e0y s\u1eed d\u1ee5ng plasma \u0111\u1ec3 thay th\u1ebf ng\u1ecdn l\u1eeda hydro-oxy l\u00e0m ngu\u1ed3n nhi\u1ec7t \u0111\u1ec3 ch\u1ebf t\u1ea1o th\u1ee7y tinh th\u1ea1ch anh. Nhi\u1ec7t \u0111\u1ed9 c\u1ee7a ng\u1ecdn l\u1eeda plasma \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng trong quy tr\u00ecnh PCVD cao h\u01a1n nhi\u1ec1u so v\u1edbi ng\u1ecdn l\u1eeda th\u00f4ng th\u01b0\u1eddng. Nhi\u1ec7t \u0111\u1ed9 l\u00f5i c\u1ee7a n\u00f3 c\u00f3 th\u1ec3 l\u00ean t\u1edbi 15000K v\u00e0 nhi\u1ec7t \u0111\u1ed9 trung b\u00ecnh l\u00e0 4000~5000K. Kh\u00ed l\u00e0m vi\u1ec7c c\u00f3 th\u1ec3 \u0111\u01b0\u1ee3c l\u1ef1a ch\u1ecdn ph\u00f9 h\u1ee3p theo y\u00eau c\u1ea7u quy tr\u00ecnh c\u1ee5 th\u1ec3.<\/p>\n

Ph\u01b0\u01a1ng ph\u00e1p CVD hai b\u01b0\u1edbc<\/p>\n

Ph\u01b0\u01a1ng ph\u00e1p CVD truy\u1ec1n th\u1ed1ng c\u00f2n \u0111\u01b0\u1ee3c g\u1ecdi l\u00e0 ph\u01b0\u01a1ng ph\u00e1p m\u1ed9t b\u01b0\u1edbc ho\u1eb7c ph\u01b0\u01a1ng ph\u00e1p tr\u1ef1c ti\u1ebfp. V\u00ec h\u01a1i n\u01b0\u1edbc tham gia v\u00e0o ph\u1ea3n \u1ee9ng n\u00ean h\u00e0m l\u01b0\u1ee3ng hydroxyl trong th\u1ee7y tinh th\u1ea1ch anh \u0111\u01b0\u1ee3c ch\u1ebf t\u1ea1o b\u1eb1ng ph\u01b0\u01a1ng ph\u00e1p CVD m\u1ed9t b\u01b0\u1edbc th\u01b0\u1eddng cao v\u00e0 kh\u00f3 ki\u1ec3m so\u00e1t. \u0110\u1ec3 kh\u1eafc ph\u1ee5c nh\u01b0\u1ee3c \u0111i\u1ec3m n\u00e0y, c\u00e1c k\u1ef9 s\u01b0 \u0111\u00e3 c\u1ea3i ti\u1ebfn ph\u01b0\u01a1ng ph\u00e1p CVD m\u1ed9t b\u01b0\u1edbc v\u00e0 ph\u00e1t tri\u1ec3n ph\u01b0\u01a1ng ph\u00e1p CVD hai b\u01b0\u1edbc, c\u00f2n \u0111\u01b0\u1ee3c g\u1ecdi l\u00e0 ph\u01b0\u01a1ng ph\u00e1p t\u1ed5ng h\u1ee3p gi\u00e1n ti\u1ebfp.<\/p>\n

Bi\u1ebfn t\u00ednh nhi\u1ec7t<\/p>\n

Ph\u01b0\u01a1ng ph\u00e1p bi\u1ebfn t\u00ednh nhi\u1ec7t \u0111\u1ea7u ti\u00ean l\u00e0m m\u1ec1m v\u1eadt li\u1ec7u n\u1ec1n th\u1ee7y tinh th\u1ea1ch anh b\u1eb1ng c\u00e1ch nung n\u00f3ng, sau \u0111\u00f3 thu \u0111\u01b0\u1ee3c s\u1ea3n ph\u1ea9m mong mu\u1ed1n th\u00f4ng qua c\u00e1c ph\u01b0\u01a1ng ph\u00e1p nh\u01b0 ch\u00ecm m\u00e1ng v\u00e0 k\u00e9o. Trong l\u00f2 bi\u1ebfn t\u00ednh nhi\u1ec7t, th\u00e2n l\u00f2 \u0111\u01b0\u1ee3c nung n\u00f3ng b\u1eb1ng ph\u01b0\u01a1ng ph\u00e1p gia nhi\u1ec7t c\u1ea3m \u1ee9ng \u0111i\u1ec7n t\u1eeb. D\u00f2ng \u0111i\u1ec7n xoay chi\u1ec1u ch\u1ea1y qua cu\u1ed9n c\u1ea3m \u1ee9ng trong l\u00f2 t\u1ea1o ra tr\u01b0\u1eddng \u0111i\u1ec7n t\u1eeb xoay chi\u1ec1u trong kh\u00f4ng gian v\u00e0 tr\u01b0\u1eddng \u0111i\u1ec7n t\u1eeb t\u00e1c \u0111\u1ed9ng l\u00ean b\u1ed9 ph\u1eadn gia nhi\u1ec7t \u0111\u1ec3 t\u1ea1o ra d\u00f2ng \u0111i\u1ec7n v\u00e0 nhi\u1ec7t. Khi nhi\u1ec7t \u0111\u1ed9 t\u0103ng, v\u1eadt li\u1ec7u n\u1ec1n th\u1ee7y tinh th\u1ea1ch anh m\u1ec1m ra v\u00e0 t\u1ea1i th\u1eddi \u0111i\u1ec3m n\u00e0y, c\u00f3 th\u1ec3 t\u1ea1o th\u00e0nh thanh\/\u1ed1ng th\u1ee7y tinh th\u1ea1ch anh b\u1eb1ng c\u00e1ch k\u00e9o xu\u1ed1ng b\u1eb1ng m\u00e1y k\u00e9o. B\u1eb1ng c\u00e1ch \u0111i\u1ec1u ch\u1ec9nh nhi\u1ec7t \u0111\u1ed9 trong l\u00f2 v\u00e0 t\u1ed1c \u0111\u1ed9 k\u00e9o, c\u00f3 th\u1ec3 k\u00e9o ra c\u00e1c thanh\/\u1ed1ng th\u1ee7y tinh th\u1ea1ch anh c\u00f3 \u0111\u01b0\u1eddng k\u00ednh kh\u00e1c nhau. B\u1ed1 tr\u00ed cu\u1ed9n d\u00e2y v\u00e0 c\u1ea5u tr\u00fac l\u00f2 c\u1ee7a l\u00f2 gia nhi\u1ec7t c\u1ea3m \u1ee9ng \u0111i\u1ec7n t\u1eeb c\u00f3 \u1ea3nh h\u01b0\u1edfng l\u1edbn \u0111\u1ebfn tr\u01b0\u1eddng nhi\u1ec7t \u0111\u1ed9 trong l\u00f2. Trong s\u1ea3n xu\u1ea5t th\u1ef1c t\u1ebf, tr\u01b0\u1eddng nhi\u1ec7t \u0111\u1ed9 trong l\u00f2 c\u1ea7n \u0111\u01b0\u1ee3c ki\u1ec3m so\u00e1t ch\u1eb7t ch\u1ebd \u0111\u1ec3 \u0111\u1ea3m b\u1ea3o ch\u1ea5t l\u01b0\u1ee3ng s\u1ea3n ph\u1ea9m th\u1ee7y tinh th\u1ea1ch anh.<\/p>\n","protected":false},"excerpt":{"rendered":"

Th\u1ee7y tinh th\u1ea1ch anh c\u00f3 th\u1ec3 \u0111\u01b0\u1ee3c ph\u00e2n lo\u1ea1i theo quy tr\u00ecnh ch\u1ebf bi\u1ebfn. C\u00f3 hai lo\u1ea1i nguy\u00ean li\u1ec7u ch\u00ednh \u0111\u1ec3 ch\u1ebf bi\u1ebfn th\u1ee7y tinh th\u1ea1ch anh.<\/p>\n","protected":false},"author":7,"featured_media":135613,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"footnotes":""},"categories":[852],"tags":[],"class_list":["post-135649","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-cong-nghiep-tin-tuc-vi"],"acf":[],"_links":{"self":[{"href":"https:\/\/www.alpapowder.com\/vi\/wp-json\/wp\/v2\/posts\/135649","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.alpapowder.com\/vi\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.alpapowder.com\/vi\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.alpapowder.com\/vi\/wp-json\/wp\/v2\/users\/7"}],"replies":[{"embeddable":true,"href":"https:\/\/www.alpapowder.com\/vi\/wp-json\/wp\/v2\/comments?post=135649"}],"version-history":[{"count":1,"href":"https:\/\/www.alpapowder.com\/vi\/wp-json\/wp\/v2\/posts\/135649\/revisions"}],"predecessor-version":[{"id":135650,"href":"https:\/\/www.alpapowder.com\/vi\/wp-json\/wp\/v2\/posts\/135649\/revisions\/135650"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.alpapowder.com\/vi\/wp-json\/wp\/v2\/media\/135613"}],"wp:attachment":[{"href":"https:\/\/www.alpapowder.com\/vi\/wp-json\/wp\/v2\/media?parent=135649"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.alpapowder.com\/vi\/wp-json\/wp\/v2\/categories?post=135649"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.alpapowder.com\/vi\/wp-json\/wp\/v2\/tags?post=135649"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}